Nitrogen irradiation of Fe/Si bilayers: nitride versus silicide phase formation

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Bibliographic Details
Published in:	Applied physics. A, Materials science & processing Vol. 79; no. 8; pp. 2093 - 2097
Main Authors:	MILINOVIC, V, BIBIC, N, DHAR, S, SILJEGOVIC, M, SCHAAF, P, LIEB, K. P
Format:	Journal Article
Language:	English
Published:	Berlin Springer 01-12-2004
Subjects:	Composition; defects and impurities Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Nitrogen Ions Moessbauer effect Ion implantation RBS Annealing Fluence Iron Experimental study Conversion electron spectra Nitrides Silicon Sputter deposition Bilayers
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Description
ISSN:	0947-8396 1432-0630
DOI:	10.1007/s00339-004-2889-2