Elastic suspension of a superminiature MEMS gyro

This paper considers a superminiature MEMS gyro with a volume of the sensor and suspension of less than 0.2 mm 3 . Mathematical models for calculating and analyzing the natural frequencies of the distributed system elastic suspension-sensitive element of a MEMS gyro were constructed and analyzed. Th...

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Bibliographic Details
Published in:	Gyroscopy and navigation (Online) Vol. 2; no. 4; pp. 239 - 246
Main Authors:	Dzhashitov, V. E., Pankratov, V. M.
Format:	Journal Article
Language:	English
Published:	Dordrecht SP MAIK Nauka/Interperiodica 01-10-2011
Subjects:	Aerospace Technology and Astronautics Engineering Geophysics/Geodesy Curve Beam Straight Beam Angular Rate Sensitive Element Beam Section
Online Access:	Get full text
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Summary:	This paper considers a superminiature MEMS gyro with a volume of the sensor and suspension of less than 0.2 mm 3 . Mathematical models for calculating and analyzing the natural frequencies of the distributed system elastic suspension-sensitive element of a MEMS gyro were constructed and analyzed. The required algorithms and software were developed. The determined resonance frequencies enable automatic selection of the geometric parameters of elastic suspension, which provide the sensor resonance tuning. The influence of manufacturing tolerances on the suspension characteristics was estimated.
ISSN:	2075-1087 2075-1109
DOI:	10.1134/S2075108711040079