Properties of Ti coatings deposited by high-power ion beams

Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the subs...

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Bibliographic Details
Published in:	Inorganic materials : applied research Vol. 3; no. 3; pp. 220 - 225
Main Authors:	Struts, V. K., Matvienko, V. M., Petrov, A. V., Ryabchikov, A. I.
Format:	Journal Article
Language:	English
Published:	Dordrecht SP MAIK Nauka/Interperiodica 01-05-2012
Subjects:	Chemistry Chemistry and Materials Science Functional Coatings and Surface Treatment Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science high-power ion beams adhesion ablation plasma nanohardness friction coefficient titanium coating
Online Access:	Get full text
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Summary:	Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.
ISSN:	2075-1133 2075-115X
DOI:	10.1134/S2075113311030269