Application of electrodynamic and magnetic circuits in inertial piezoelectric drives

Application of electrodynamic and magnetic circuits in inertial piezoelectric drives

Ways to improve the operational performances of inertial piezodrives in the nanometer range of displacements are presented. It is proposed to use a magnetic field-conductor electrodynamic system to improve the accuracy of displacement, to measure the travel speed of the movable object, and to damp t...

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Bibliographic Details
Published in:Russian electrical engineering Vol. 80; no. 8; pp. 422 - 425
Main Authors: Lipanov, A. M., Shelkovnikov, Yu. K., Gulyaev, P. V., Tyurikov, A. V.
Format: Journal Article
Language:English
Published: Heidelberg Allerton Press, Inc 01-08-2009
Subjects:
Engineering
Machines
Manufacturing
Processes
magnetic damping
electrodynamic system
electrodynamic velocity sensor
magnetic circuit
inertial piezodrive
compensation
precision displacements
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Description
Summary:Ways to improve the operational performances of inertial piezodrives in the nanometer range of displacements are presented. It is proposed to use a magnetic field-conductor electrodynamic system to improve the accuracy of displacement, to measure the travel speed of the movable object, and to damp the vibrations of the drive’s piezoelement.
ISSN:1068-3712
1934-8010
DOI:10.3103/S1068371209080021