Dielectric breakdown of oxide films in electronic devices

Dielectric breakdown is a sudden and catastrophic increase in the conductivity of an insulator caused by electrical stress. It is one of the major reliability issues in electronic devices using insulating films as gate insulators and in energy and memory capacitors. Despite extensive studies, our un...

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Bibliographic Details
Published in:	Nature reviews. Materials Vol. 9; no. 9; pp. 607 - 627
Main Authors:	Padovani, Andrea, La Torraca, Paolo, Strand, Jack, Larcher, Luca, Shluger, Alexander L.
Format:	Journal Article
Language:	English
Published:	London Nature Publishing Group UK 01-09-2024 Nature Publishing Group
Subjects:	639/166/987 639/301/1005/1007 Biomaterials Chemistry and Materials Science Condensed Matter Physics Dielectric breakdown Electric fields Electrical resistivity Electronic devices Insulation Insulators Integrated circuits Materials Science Memory devices Nanotechnology Optical and Electronic Materials Oxide coatings Reliability Review Article Transistors
Online Access:	Get full text
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