Measurements of Nonlinear Dielectric Constants of Pb(Zr,Ti)O 3 Thin Films Using a Dynamic Measuring Method
The nonlinear dielectric constants of Pb(Zr,Ti)O 3 (PZT) thin films were studied using a dynamic measuring method. The 111-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol–gel method. The ε 333 of the films increased with the Zr conce...
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| Published in: | Japanese Journal of Applied Physics Vol. 52; no. 9S1; p. 9 |
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| Main Authors: | , |
| Format: | Journal Article |
| Language: | English |
| Published: |
01-09-2013
|
| Online Access: | Get full text |
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| Summary: | The nonlinear dielectric constants of Pb(Zr,Ti)O
3
(PZT) thin films were studied using a dynamic measuring method. The 111-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol–gel method. The ε
333
of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti= 52/48). This measured value is 400 times larger than that of LiTaO
3
single crystals. |
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| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.7567/JJAP.52.09KA08 |