Lithography by tapping-mode atomic force microscopy with electrostatic force modulation

Lithography by tapping-mode atomic force microscopy with electrostatic force modulation

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Vol. 66; no. 7; pp. S95 - S98
Main Authors: Kim, B.I., Pi, U.H., Khim, Z.G., Yoon, S.
Format: Journal Article
Language:English
Published: 01-03-1998
Online Access:Get full text
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Description
ISSN:0947-8396
1432-0630
DOI:10.1007/s003390051108