Formation of hydrogenated diamond-like carbon films by reactive Ar/CH 4 high-power impulse magnetron sputtering

Formation of hydrogenated diamond-like carbon films by reactive Ar/CH 4 high-power impulse magnetron sputtering

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 53; no. 9; p. 90301
Main Authors: Kimura, Takashi, Nishimura, Ryotaro
Format: Journal Article
Language:English
Published: 01-09-2014
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.53.090301