Wide Band Frequency Characterization of Al-Doped and Undoped Rutile TiO 2 Thin Films for MIM Capacitors

In this letter, the dielectric properties of rutile TiO2 thin films are studied for metal-insulator-metal capacitor applications. The dielectric constant, the ac conductivity, and the loss tangent are measured in a wide band frequency range, from 1 Hz to 2 GHz. The effect of aluminum doping, as well...

Full description

Bibliographic Details

Published in:	IEEE electron device letters Vol. 38; no. 3; pp. 375 - 378
Main Authors:	Chaker, Ahmad, Bermond, Cedric, Artillan, Philippe, Gonon, Patrice, Vallee, Christophe, Bsiesy, Ahmad
Format:	Journal Article
Language:	English
Published:	Institute of Electrical and Electronics Engineers 01-03-2017
Subjects:	Physics
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!