Metasurface-based planar microlenses for SPAD pixels

Metasurface-based planar microlenses for SPAD pixels

International Image Sensor Workshop, International Images Sensor Society, May 2023, Crieff, United Kingdom In this paper we present two design generations of metasurface-based planar microlenses implemented on Front-Side Illumination SPAD pixels. This kind of microlens is an alternative to conventio...

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Bibliographic Details
Main Authors: Vaillant, Jérôme, Dilhan, Lucie, Ostrovsky, Alain, Abadie, Quentin, Masarotto, Lilian, Paquet, Romain, Cavelier, Mickaël, Bellegarde, Cyril
Format: Journal Article
Language:English
Published: 20-03-2024
Subjects:
Physics - Applied Physics
Physics - Optics
Online Access:Get full text
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Summary:International Image Sensor Workshop, International Images Sensor Society, May 2023, Crieff, United Kingdom In this paper we present two design generations of metasurface-based planar microlenses implemented on Front-Side Illumination SPAD pixels. This kind of microlens is an alternative to conventional reflow microlens. It offers more degrees of freedom in term of design, especially the capability to design off-axis microlens to gather light around the SPAD photodiode. The two generations of microlenses have been fabricated on STMicroelectronics SPAD and characterized. We validated the sensitivity improvement offered by extended metasurface-based microlens. We also confirmed the impact of lithography capability on metasurface performances, highlighting the
DOI:10.48550/arxiv.2403.13396