Multi-Dimensional, Non-Contact Metrology using Trilateration and High Resolution FMCW Ladar

Here we propose, describe, and provide experimental proof-of-concept demonstrations of a multi-dimensional, non-contact length metrology system design based on high resolution (millimeter to sub-100 micron) frequency modulated continuous wave (FMCW) ladar and trilateration based on length measuremen...

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Bibliographic Details
Main Authors: Mateo, Ana Baselga, Barber, Zeb W
Format: Journal Article
Language:English
Published: 27-02-2015
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Summary:Here we propose, describe, and provide experimental proof-of-concept demonstrations of a multi-dimensional, non-contact length metrology system design based on high resolution (millimeter to sub-100 micron) frequency modulated continuous wave (FMCW) ladar and trilateration based on length measurements from multiple, optical fiber-connected transmitters. With an accurate FMCW ladar source, the trilateration based design provides 3D resolution inherently independent of stand-off range and allows self-calibration to provide flexible setup of a field system. A proof-of-concept experimental demonstration was performed using a highly-stabilized, 2 THz bandwidth chirped laser source, two emitters, and one scanning emitter/receiver providing 1D surface profiles (2D metrology) of diffuse targets. The measured coordinate precision of < 200 microns was determined to be limited by laser speckle issues caused by diffuse scattering of the targets.
DOI:10.48550/arxiv.1503.00042