Determining the Location and Cause of Unintentional Quantum Dots in a Nanowire
We determine the locations of unintentional quantum dots (U-QDs) in a silicon nanowire with a precision of a few nanometers by comparing the capacitances to multiple gates with a capacitance simulation. Because we observe U-QDs in the same location of the wire in multiple devices, their cause is lik...
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Main Authors: | , |
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Format: | Journal Article |
Language: | English |
Published: |
24-01-2012
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Subjects: | |
Online Access: | Get full text |
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Summary: | We determine the locations of unintentional quantum dots (U-QDs) in a silicon
nanowire with a precision of a few nanometers by comparing the capacitances to
multiple gates with a capacitance simulation. Because we observe U-QDs in the
same location of the wire in multiple devices, their cause is likely to be an
unintended consequence of the fabrication, not random atomic-scale defects as
is typically assumed. The locations of the U-QDs appear consistent with
conduction band modulation from strain from the oxide and the gates. This
allows us to suggest methods to reduce the frequency of U-QDs. |
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DOI: | 10.48550/arxiv.1201.5144 |