Determining the Location and Cause of Unintentional Quantum Dots in a Nanowire

We determine the locations of unintentional quantum dots (U-QDs) in a silicon nanowire with a precision of a few nanometers by comparing the capacitances to multiple gates with a capacitance simulation. Because we observe U-QDs in the same location of the wire in multiple devices, their cause is lik...

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Bibliographic Details
Main Authors: Thorbeck, Ted, Zimmerman, Neil M
Format: Journal Article
Language:English
Published: 24-01-2012
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Summary:We determine the locations of unintentional quantum dots (U-QDs) in a silicon nanowire with a precision of a few nanometers by comparing the capacitances to multiple gates with a capacitance simulation. Because we observe U-QDs in the same location of the wire in multiple devices, their cause is likely to be an unintended consequence of the fabrication, not random atomic-scale defects as is typically assumed. The locations of the U-QDs appear consistent with conduction band modulation from strain from the oxide and the gates. This allows us to suggest methods to reduce the frequency of U-QDs.
DOI:10.48550/arxiv.1201.5144