Preparation and properties of alane dimethylethylamine, a liquid precursor for MOCVD

Preparation and properties of alane dimethylethylamine, a liquid precursor for MOCVD

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Bibliographic Details
Published in:Chemistry of materials Vol. 6; no. 2; pp. 190 - 195
Main Authors: Frigo, D. M, van Eijden, G. J. M, Reuvers, P. J, Smit, C. J
Format: Journal Article
Language:English
Published: American Chemical Society 01-02-1994
Online Access:Get full text
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Description
Bibliography:ark:/67375/TPS-0728RFVH-B
istex:C716E8B09283FED83E8B3EAE16EFB8318EF610C1
ISSN:0897-4756
1520-5002
DOI:10.1021/cm00038a015