Mechanisms of Directed Self-Assembly in Cylindrical Hole Confinements
The directed self-assembly of block copolymers in cylindrical holes is a promising technology for lithographic patterning, particularly in the context of vertical interconnect accesses. While the hole-shrink process for single cylinders has been extensively explored, the proliferation of morphologic...
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| Published in: | Macromolecules Vol. 51; no. 7; pp. 2418 - 2427 |
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| Main Authors: | , , |
| Format: | Journal Article |
| Language: | English |
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American Chemical Society
10-04-2018
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| Abstract | The directed self-assembly of block copolymers in cylindrical holes is a promising technology for lithographic patterning, particularly in the context of vertical interconnect accesses. While the hole-shrink process for single cylinders has been extensively explored, the proliferation of morphological defects remains a significant technological barrier. We use a coarse-grained model to explore morphologies that form within cylindrical confinements for combinations of template surface energies. We identify metastable defect morphologies, in addition to the desired cylindrical morphology, in majority-wetting sidewall templates. We use our coarse-grained model and the string method to identify transition pathways between defective morphologies and the cylindrical morphology to elucidate the mechanism of defect annihilation within the confinements; the transition pathway from a disordered state is also identified. This work demonstrates that the minimum free energy path for the formation of a cylinder goes through defective morphologies and that designing confinements can eliminate these undesirable transition states. |
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| AbstractList | The directed self-assembly of block copolymers in cylindrical holes is a promising technology for lithographic patterning, particularly in the context of vertical interconnect accesses. While the hole-shrink process for single cylinders has been extensively explored, the proliferation of morphological defects remains a significant technological barrier. We use a coarse-grained model to explore morphologies that form within cylindrical confinements for combinations of template surface energies. We identify metastable defect morphologies, in addition to the desired cylindrical morphology, in majority-wetting sidewall templates. We use our coarse-grained model and the string method to identify transition pathways between defective morphologies and the cylindrical morphology to elucidate the mechanism of defect annihilation within the confinements; the transition pathway from a disordered state is also identified. This work demonstrates that the minimum free energy path for the formation of a cylinder goes through defective morphologies and that designing confinements can eliminate these undesirable transition states. We report the directed self-assembly of block copolymers in cylindrical holes is a promising technology for lithographic patterning, particularly in the context of vertical interconnect accesses. While the hole-shrink process for single cylinders has been extensively explored, the proliferation of morphological defects remains a significant technological barrier. We use a coarse grained model to explore morphologies that form within cylindrical confinements for combinations of template surface energies. We identify metastable defect morphologies, in addition to the desired cylindrical morphology, in majority-wetting sidewall templates. We use our coarse-grained model and the string method to identify transition pathways between defective morphologies and the cylindrical morphology to elucidate the mechanism of defect annihilation within the confinements; the transition pathway from a disordered state is also identified. Lastly, this work demonstrates that the minimum free energy path for the formation of a cylinder goes through defective morphologies and that designing confinements can eliminate these undesirable transition states. |
| Author | de Pablo, Juan J Bezik, Cody T Garner, Grant P |
| AuthorAffiliation | University of Chicago Institute for Molecular Engineering |
| AuthorAffiliation_xml | – name: Institute for Molecular Engineering – name: University of Chicago |
| Author_xml | – sequence: 1 givenname: Cody T orcidid: 0000-0002-1940-4895 surname: Bezik fullname: Bezik, Cody T organization: University of Chicago – sequence: 2 givenname: Grant P surname: Garner fullname: Garner, Grant P organization: University of Chicago – sequence: 3 givenname: Juan J orcidid: 0000-0002-3526-516X surname: de Pablo fullname: de Pablo, Juan J email: depablo@uchicago.edu organization: University of Chicago |
| BackLink | https://www.osti.gov/servlets/purl/1498499$$D View this record in Osti.gov |
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| CitedBy_id | crossref_primary_10_1021_acsnano_8b08382 crossref_primary_10_1021_acs_macromol_0c00983 crossref_primary_10_3740_MRSK_2019_29_12_804 crossref_primary_10_1116_1_5121541 |
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| Title | Mechanisms of Directed Self-Assembly in Cylindrical Hole Confinements |
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