Search Results - "van Beek, J.T.M."

Modelling the dynamics of a MEMS resonator: Simulations and experiments by Mestrom, R.M.C., Fey, R.H.B., van Beek, J.T.M., Phan, K.L., Nijmeijer, H.

“…Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the…”
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A SOI Pirani sensor with triple heat sinks by Li, Q., Goosen, J.F.L., van Beek, J.T.M., van Keulen, F.

“…In this paper, we present a novel MEMS Pirani sensor with triple heat sinks which was designed to measure the pressure inside thin film, wafer level packages…”
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Dual-mode device for in situ testing of MEMS packaging quality by Suijlen, M.A.G., van der Avoort, C., van Beek, J.T.M., Koning, J.J., Beijerinck, H.C.W.

“…A method is presented to rapidly characterize the hermeticity of a vacuum cavity for a high frequency (ω0/(2π)=56MHz) micromechanical bulk-wave resonator. The…”
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Failure analysis of a thin-film nitride MEMS package by Li, Q., Goosen, J.F.L., van Beek, J.T.M., van Keulen, F., Phan, K.L., Zhang, G.Q.

“…In this paper, the failure mechanism of a thin-film nitride MEMS package is studied by an integrated test structure. The cause of the failure is investigated…”
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Temperature stability of a piezoresistive MEMS resonator including self-heating by Bendida, S., Koning, J.J., Bontemps, J.J.M., van Beek, J.T.M., Wu, D., van Gils, M.A.J., Nath, S.

“…Temperature stability of a piezoresistive 1.5 μm thin SOI resonator at 74 MHz is presented. As compared to capacitive resonators the self-heating due to the…”
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Packaging influences on the reliability of MEMS resonators by Zaal, J.J.M., van Driel, W.D., Bendida, S., Li, Q., van Beek, J.T.M., Zhang, G.Q.

“…In this paper, the effect of assembly processes on the reliability of MEMS resonators is investigated. The common functions of MEMS resonators in the current…”
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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients by De Coster, J., Tilmans, H.A.C., den Toonder, J.M.J., van Beek, J.T.M., Rijks, Th.G.S.M., Steeneken, P.G., Puers, R.

“…This paper investigates the influence of residual stress on the characteristics of electrostatic actuators. This is first done empirically by mechanical…”
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Gas ambient dependence of quality factor in MEMS resonators by Li, Q., Goosen, J.F.L., van Keulen, F., van Beek, J.T.M.

“…In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with…”
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Elimination of accumulation charge effects for high-resistive silicon substrates by Jansman, A.B.M., van Beek, J.T.M., van Delden, M.H.W.M., Kemmeren, A.L.A.M., den Dekker, A., Widdershoven, F.P.

“…A dedicated silicon process, called PASSI/spl trade/, was developed for passive functions in the GHz regime. The process, using high-resistive silicon with a…”
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The influence of the package environment on the functioning and reliability of RF-MEMS switches by van Spengen, W.M., Czarnecki, P., Puers, R., van Beek, J.T.M., De Wolf, I.

“…This paper discusses the influence of pressure and gas inside a package on the functioning and lifetime of capacitive RF-MEMS switches. It is shown that…”
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A 10MHz piezoresistive MEMS resonator with high Q by van Beek, J.T.M., Steeneken, P.G., Giesbers, B.

“…A novel bulk mode MEMS resonator is presented where mechanical motion is detected using the piezoresistive properties of Si. The piezoresistive readout allows…”
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Assaembly induced failures in thin film MEMS packages by Zaal, J.J.M., van Driel, W.D., van Beek, J.T.M., Zhang, G.Q.

“…In the growing MEMS market wafer level thin film packages can be applied to an increasing number of MEMS devices. This paper discusses the effects of common…”
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Passive integration and RF MEMS: a toolkit for adaptive LC circuits by Rijks, T.G.S.M., van Beek, J.T.M., Ulenaers, M.J.E., De Coster, J., Puers, R., den Dekker, A., van Teeffelen, L.

“…RF MEMS variable capacitors have been realized in an industrialized thin-film process for manufacturing high-quality inductors and capacitors on high-ohmic…”
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Piezoresistive ring-shaped MEMS resonator by Phan, K.L., van Beek, J.T.M., Koops, G.E.J.

“…We have previously reported a new class of MEMS resonators based on the piezoresistive readout principle and extensional vibration mode. Those devices suffer…”
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Passive integration on Si for RF circuits in wireless applications by Pulsford, N.J., Van Beek, J.T.M., Van Delden, M.H.W.M., Boogaard, A., Milsom, R.F.

“…A technology is described for the integration of high quality factor inductors and capacitors on high ohmic silicon. The performance is optimised for resonator…”
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A piezo-resistive resonant MEMS amplifier by van Beek, J.T.M., Phan, K.L., Verheijden, G.J.A.M., Koops, G.E.J., van der Avoort, C., van Wingerden, J., Badaroglu, D.E., Bontemps, J.J.M., Puers, R.

“…A MEMS resonator using electrostatic to piezo-resistive transduction is demonstrated to be capable of simultaneous signal filtering and amplification. The…”
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Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator by van Beek, J.T.M., Verheijden, G.J.A., Koops, G.E.J., Phan, K.L., van der Avoort, C., van Wingerden, J., Badaroglu, D.E., Bontemps, J.J.M.

“…This paper demonstrates a 1.1 GHz MEMS resonator operating in fundamental mode occupying a chip area of only several mum 2 . To our knowledge this is the…”
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The Effects of Thermal Oxidation of a MEMS Resonator on Temperature Drift and Absolute Frequency by van der Avoort, C., van Wingerden, J., van Beek, J.T.M.

“…The dependency of the resonance frequency on temperature, in short temperature drift, of Si resonators is the major contributor to frequency inaccuracy of MEMS…”
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Sub-10 nm pattern placement verification of quantum tomography freestanding gratings by Eurlings, M.F.A., van Beek, J.T.M., Verheijen, M.J., Weterings, J.P., Beijerinck, H.C.W.

“…First, a new method to detect drift induced electron beam placement errors is presented; by writing the grating in interlaced series the time between writing…”
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Mechanical phase inversion for coupled lamé mode resonator array filters by Jize Yan, Seshia, A.A., Phan, K.L., van Beek, J.T.M.

“…This paper reports a novel mechanism for mechanical phase inversion in MEMS filters to overcome the effects of capacitive parasitics without using external…”
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