Beam discharge for new technology

Summary form only given. For new technological developments, we propose a high efficiency ionization method-Plasma beam discharge in a magnetic field. This type of discharge makes it possible to obtain a highly ionized plasma in a large volume. A great variety of substances can be used for plasma ge...

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Bibliographic Details

Published in:	IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science p. 123
Main Authors:	Ghorannevis, M., Abbaspour, A., Salami, M.R., Zorriasatin, S., Pouraslan, A.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 1997
Subjects:	Atmospheric waves Ion beams Ionization Magnetic fields Physics Plasma applications Radio frequency Surface cleaning Surface treatment Thermal loading
Online Access:	Get full text
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