Search Results - "Zoppel, S"
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Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells
Published in Applied physics. A, Materials science & processing (01-10-2007)“…We report on recent results on selective ablation of TCO (SnO2, ZnO) and metallic layers as a possible process for structuring thin film solar cells. The…”
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Contact and proximity lithography using 193 nm Excimer laser in Mask Aligner
Published in Microelectronic engineering (01-05-2010)“…In this paper we describe the use of an Excimer laser for full-field lithography in a Mask Aligner. The DUV light from the Excimer laser is homogenized by…”
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Journal Article Conference Proceeding -
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Enhancement of laser ablation yield by two color excitation
Published in Applied physics. A, Materials science & processing (01-09-2005)Get full text
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Contact and proximity lithography using 193nm Excimer laser in Mask Aligner
Published in Microelectronic engineering (01-05-2010)Get full text
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Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femtosecond laser
Published in Applied surface science (15-12-2005)“…Micropatterning of strontium titanate for use in storage capacitor cells, for example, is of great interest. Earlier studies have indicated that laser…”
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Laser micro machining of 3C–SiC single crystals
Published in Microelectronic engineering (01-04-2006)“…We have studied laser ablation of silicon carbide with emphasis on the influence of pulse duration and laser wavelength. Experiments with 193 and 248 nm…”
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Journal Article Conference Proceeding -
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Elimination of cracking during UV laser ablation of SrTiO 3 single crystals by employing a femtosecond laser
Published in Applied surface science (15-12-2005)“…We have performed a comparative study of UV laser ablation of SrTiO 3 with nanosecond- and sub-picosecond sources, respectively. The experiments were performed…”
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Elimination of cracking during UV laser ablation of SrTiO3single crystals by employing a femtosecond laser
Published in Applied surface science (2005)Get full text
Journal Article -
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Rapid Prototyping für optofluidische Anwendungen
Published in Elektrotechnik und Informationstechnik (01-02-2009)Get full text
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Rapid prototyping for optofluidic applications
Published in Elektrotechnik und Informationstechnik (2009)“…Zusammenfassung Die Fertigung von mikrofluidischen Strukturen für die Analyse von chemischen und biochemischen Probeneigenschaften im Rahmen eines optischen…”
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A novel microfluidic sensor system fabricated by SU-8 femtosecond pulsed laser prototyping
Published in 2008 31st International Spring Seminar on Electronics Technology (01-05-2008)“…In this paper we present the design, simulation and measurement results of a novel sensor system fabricated by femtosecond pulsed laser prototyping. To our…”
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Conference Proceeding -
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Micro structuring of photoresist with femtosecond laser pulses
Published in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (01-06-2007)“…Femtosecond laser pulses permit laser ablation almost free of any heat load to the material, which allows the structuring of various materials with high…”
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Conference Proceeding