Search Results - "Zoppel, S"

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  1. 1

    Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells by Zoppel, S., Huber, H., Reider, G.A.

    “…We report on recent results on selective ablation of TCO (SnO2, ZnO) and metallic layers as a possible process for structuring thin film solar cells. The…”
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    Journal Article
  2. 2

    Contact and proximity lithography using 193 nm Excimer laser in Mask Aligner by Partel, S., Zoppel, S., Hudek, P., Bich, A., Vogler, U., Hornung, M., Voelkel, R.

    Published in Microelectronic engineering (01-05-2010)
    “…In this paper we describe the use of an Excimer laser for full-field lithography in a Mask Aligner. The DUV light from the Excimer laser is homogenized by…”
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    Journal Article Conference Proceeding
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    Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femtosecond laser by Zoppel, S, Gray, D, Farsari, M, Merz, R, Reider, G A, Fotakis, C

    Published in Applied surface science (15-12-2005)
    “…Micropatterning of strontium titanate for use in storage capacitor cells, for example, is of great interest. Earlier studies have indicated that laser…”
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    Journal Article
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    Laser micro machining of 3C–SiC single crystals by Zoppel, Sandra, Farsari, Maria, Merz, Robert, Zehetner, Johann, Stangl, Günther, Reider, Georg A., Fotakis, Costas

    Published in Microelectronic engineering (01-04-2006)
    “…We have studied laser ablation of silicon carbide with emphasis on the influence of pulse duration and laser wavelength. Experiments with 193 and 248 nm…”
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    Journal Article Conference Proceeding
  8. 8

    Elimination of cracking during UV laser ablation of SrTiO 3 single crystals by employing a femtosecond laser by Zoppel, S., Gray, D., Farsari, M., Merz, R., Reider, G.A., Fotakis, C.

    Published in Applied surface science (15-12-2005)
    “…We have performed a comparative study of UV laser ablation of SrTiO 3 with nanosecond- and sub-picosecond sources, respectively. The experiments were performed…”
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    Journal Article
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    Rapid prototyping for optofluidic applications by Rosenauer, M., Zoppel, S., Spitzbart, M., Vellekoop, M. J.

    “…Zusammenfassung Die Fertigung von mikrofluidischen Strukturen für die Analyse von chemischen und biochemischen Probeneigenschaften im Rahmen eines optischen…”
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    Journal Article
  12. 12

    A novel microfluidic sensor system fabricated by SU-8 femtosecond pulsed laser prototyping by Rosenauer, M., Zoppel, S., Vellekoop, M.J.

    “…In this paper we present the design, simulation and measurement results of a novel sensor system fabricated by femtosecond pulsed laser prototyping. To our…”
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    Conference Proceeding
  13. 13

    Micro structuring of photoresist with femtosecond laser pulses by Zoppel, S., Partel, S., Choleva, P., Hudek, P., Huber, H., Lederer, M., der Au, J. Aus, Reider, G.A.

    “…Femtosecond laser pulses permit laser ablation almost free of any heat load to the material, which allows the structuring of various materials with high…”
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    Conference Proceeding