Search Results - "Zhu, Cynthia"

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    A Curvilinear OPC Workflow for Highly Repetitive Structures and High Aspect Ratio Patterns by Gao, Xing, Chen, Ken, Li, Xiaomeng, Zhao, Xuan, Kim, Keeho, Zhang, Xima, Zhu, Cynthia

    “…In this study, a workflow based on curvilinear OPC (CLOPC) & memory OPC (MEMOPC) is introduced. In the workflow, the curvilinear-based method is applied on…”
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    Conference Proceeding
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    A Workflow of Hotspot Prediction based on Semi-Supervised Machine Learning Methodology by Zhang, Wenwen, Chen, Ken, Li, Xiaomei, Ma, Yuansheng, Zhu, Cynthia, Chen, Baron, Gao, Xing, Kim, Keeho

    “…Fast lithography hotspot (HS) detection flow becomes critical with continuously improving manufacturing conditions. A feature-vector-based machine learning…”
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    Conference Proceeding
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    Curvilinear OPC Application On 180nm Silicon Photonics Layout For Better Performance by Wu, Qing, Li, Zhifeng, Zhu, Cynthia, Peng, Lulu, Jin, Yadong, Shao, Feng, Lippincott, George, Liubich, Vlad, Cao, Guowei, Sandhu, Avneet

    “…This Advanced silicon photonics (SiPho) device design requires RET OPC technology to increase manufacturability. However, the traditional OPC solution can't…”
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    Conference Proceeding
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    Optimal OPC model selection with SEM image contours by Zheng, Zhen-Fei, Zhang, Wei, Sun, Chen-Wei, Yang, Xiao, Li, Xiao-Mei, Shao, Feng, Zhu, Cynthia, Fenger, Germain, Yu, Yue-Long, Wang, Ying-Fang

    “…We propose a novel method to select a reliable OPC model by utilizing SEM image contours. In this proposal, the SEM image contours are extracted by Calibre…”
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    Conference Proceeding
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    Uncertainties in determining parton distributions at large x by Accardi, A., Melnitchouk, W., Owens, J. F., Christy, M. E., Keppel, C. E., Zhu, L., Morfín, J. G.

    “…We critically examine uncertainties in parton distribution functions (PDFs) at large x arising from nuclear effects in deuterium F2 structure function data…”
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    Journal Article