Layer-by-layer model of gas-thermal covering generation

This paper suggests the model to calculate the most important physical parameters of gas-thermal sputtering process. The Cu (droplets)-Fe (base) composition was studied. The most known and reliable methods are unified in the single approach making it possible to forecast future covering properties s...

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Bibliographic Details
Published in:Proceedings. The 8th Russian-Korean International Symposium on Science and Technology, 2004. KORUS 2004 Vol. 2; pp. 196 - 199 vol. 2
Main Authors: Barashkov, S.V., Butov, V.G., Zenin, B.S.
Format: Conference Proceeding
Language:English
Published: IEEE 2004
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Summary:This paper suggests the model to calculate the most important physical parameters of gas-thermal sputtering process. The Cu (droplets)-Fe (base) composition was studied. The most known and reliable methods are unified in the single approach making it possible to forecast future covering properties such as adhesion and the thermal characteristics of process using the entrance technological parameters of process.
ISBN:0780383834
9780780383838
DOI:10.1109/KORUS.2004.1555590