The Effect of Nonequilibrium Synthesis Conditions on the Structure and Optical Properties of Amorphous Carbon Films

Amorphous carbon (a-C) thin films are synthesized using a nonequilibrium method of ion-plasma sputtering of a graphite target under argon atmosphere at a constant plasma current. The local structure of carbon films is studied by the Raman spectroscopy method. Using the normal distribution in the dec...

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Bibliographic Details
Published in:Optics and spectroscopy Vol. 127; no. 2; pp. 251 - 259
Main Authors: Ryaguzov, A. P., Nemkayeva, R. R., Yukhnovets, O. I., Guseinov, N. R., Mikhailova, S. L., Bekmurat, F., Assembayeva, A. R.
Format: Journal Article
Language:English
Published: Moscow Pleiades Publishing 01-08-2019
Springer Nature B.V
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Summary:Amorphous carbon (a-C) thin films are synthesized using a nonequilibrium method of ion-plasma sputtering of a graphite target under argon atmosphere at a constant plasma current. The local structure of carbon films is studied by the Raman spectroscopy method. Using the normal distribution in the decomposition of the Raman spectra, it is found that a peak typical for a phonon density of states with sp 3 bond hybridization appears in the frequency region of 1260 cm –1 at synthesis temperatures of less than 150°C. In addition, the influence of the dimensions of nanostructures composed of sp 2 sites on the width of optical bandgap and their correlation with the results of X-ray photoelectron spectroscopy (XPS) in a-C films is shown.
ISSN:0030-400X
1562-6911
DOI:10.1134/S0030400X19080228