Search Results - "Yegorova, Yu V."
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X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures
Published in Microelectronic engineering (01-09-2013)“…[Display omitted] •Air-exposed Sr-rich–SrTiO3/B/Si-ALD systems (B: SiO2, Si3N4 and HfO2) are studied.•Surfaces of all the films are carbonate-enriched by SrCO3…”
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