Search Results - "Yegorova, Yu V."

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    X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures by Filatova, E.O., Kozhevnikov, I.V., Sokolov, A.A., Yegorova, Yu V., Konashuk, A.S., Vilkov, O.Yu, Schaefers, F., Gorgoi, M., Shulakov, A.S.

    Published in Microelectronic engineering (01-09-2013)
    “…[Display omitted] •Air-exposed Sr-rich–SrTiO3/B/Si-ALD systems (B: SiO2, Si3N4 and HfO2) are studied.•Surfaces of all the films are carbonate-enriched by SrCO3…”
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    Journal Article