Search Results - "Yckache, Karim"

Functionalization of Silica Nanoparticles and Native Silicon Oxide with Tailored Boron-Molecular Precursors for Efficient and Predictive p‑Doping of Silicon by Mathey, Laurent, Alphazan, Thibault, Valla, Maxence, Veyre, Laurent, Fontaine, Hervé, Enyedi, Virginie, Yckache, Karim, Danielou, Marianne, Kerdiles, Sébastien, Guerrero, Jean, Barnes, Jean-Paul, Veillerot, Marc, Chevalier, Nicolas, Mariolle, Denis, Bertin, François, Durand, Corentin, Berthe, Maxime, Dendooven, Jolien, Martin, François, Thieuleux, Chloé, Grandidier, Bruno, Copéret, Christophe

“…Designing new approaches to incorporate dopant impurities in semiconductor materials is essential in keeping pace with electronics miniaturization without…”
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Integration of a plasma doping PULSION® process into a fully depleted SOI transistor flow chart by Duchaine, J., Gonzatti, F., Torregrosa, F., Etienne, H., Felch, S., Milesi, F., Yckache, K., Spiegel, Y., Claverie, A.

“…In this paper we discuss the integration of plasma doping into a Fully Depleted SOI CMOS process flow (sub-10 nm top Si layer). The compatibility of PD with…”
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