Search Results - "Yang, Ru Jye"
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Improvement of Interpoly Dielectric Characteristics by Plasma Nitridation and Oxidation for Future nand Flash Memory
Published in IEEE electron device letters (01-11-2008)“…In this letter, plasma nitridation and oxidation on interpoly dielectric (IPD; SiO 2 -SiN-SiO 2 ) for cell programming speed and reliabilities are…”
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Journal Article -
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Improvement of Interpoly Dielectric Characteristics by Plasma Nitridation and Oxidation for Future @@inand@ Flash Memory
Published in IEEE electron device letters (01-11-2008)“…In this letter, plasma nitridation and oxidation on interpoly dielectric (IPD; SiO@@d2@-SiN-SiO@@d2@ ) for cell programming speed and reliabilities are…”
Get full text
Journal Article