Application of Laser Deprocessing Technique in Physical Failure Analysis on Memory Bit-counting

With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessin...

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Bibliographic Details
Published in:	2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) pp. 1 - 7
Main Authors:	PAN, Yanlin, ZHAO, Yuzhe, TAN, Pik Kee, KHOO, Patrick, YEO, Pui Ying, Luong TING, Siong, TAN, Hao, CHEN, Changqing
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-07-2019
Subjects:	Bit-counting Laser deprocessing PFA TEM
Online Access:	Get full text
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Summary:	With continuous technology scaling of semiconductor devices, conventional physical failure analysis (PFA) techniques becomes more and more challenging with the increased number of transistors and layer stacks. This paper presents a new memory bit-counting method in PFA by employing laser deprocessing technique (LDT). This LDT assisted new method is more cost-effective and efficient in the PFA on memory bit-counting in terms of shortening the total FA cycle time and lowering the requirements for the experimental equipment, which leads to the increase of PFA throughput in memory devices especially for high technology nodes.
ISSN:	1946-1550
DOI:	10.1109/IPFA47161.2019.8984871