Search Results - "Woon, W.Y."

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    Rapid thermal process driven intra-die device variations by Tsai, C.H., Aboy, M., Pelaz, L., Hsu, Y.H., Woon, W.Y., Timans, P.J., Lee, C.K.

    “…Intra-die device variation due to pattern layout effects associated with the development of ultra-fast annealing processes is one of the major scaling…”
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    Journal Article
  2. 2

    Achieving junction stability in heavily doped epitaxial Si:P by Tsai, C.H., Hsu, Y.H., Santos, I., Pelaz, L., Kowalski, J.E., Liou, J.W., Woon, W.Y., Lee, C.K.

    “…Junction stability and donor deactivation in silicon at high doping limit has been a long-standing issue in advanced semiconductor devices. Recently, heavily…”
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    Journal Article
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