Search Results - "Woon, W.Y."
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1
Rapid thermal process driven intra-die device variations
Published in Materials science in semiconductor processing (01-12-2022)“…Intra-die device variation due to pattern layout effects associated with the development of ultra-fast annealing processes is one of the major scaling…”
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Achieving junction stability in heavily doped epitaxial Si:P
Published in Materials science in semiconductor processing (01-06-2021)“…Junction stability and donor deactivation in silicon at high doping limit has been a long-standing issue in advanced semiconductor devices. Recently, heavily…”
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Journal Article -
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Robustness of large-area suspended graphene under interaction with intense laser
Published in Scientific reports (16-02-2022)“…Graphene is known as an atomically thin, transparent, highly electrically and thermally conductive, light-weight, and the strongest 2D material. We investigate…”
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Journal Article -
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Complementary Field-Effect Transistor (CFET) Demonstration at 48nm Gate Pitch for Future Logic Technology Scaling
Published in 2023 International Electron Devices Meeting (IEDM) (09-12-2023)“…This study establishes the groundwork for an industry-applicable, integrated nanosheet-based monolithic CFET process architecture with a gate pitch of 48nm. By…”
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