Search Results - "Winderickx, G."

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    Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates by De Jaeger, B., Bonzom, R., Leys, F., Richard, O., Steenbergen, J. Van, Winderickx, G., Moorhem, E. Van, Raskin, G., Letertre, F., Billon, T., Meuris, M., Heyns, M.

    Published in Microelectronic engineering (01-06-2005)
    “…A key challenge in the engineering of Ge MOSFETs is to develop a proper Ge surface passivation technique prior to high-k dielectric deposition to obtain low…”
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    Journal Article Conference Proceeding
  2. 2

    Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors by Van Huylenbroeck, S., Decoutere, S., Venegas, R., Jenei, S., Winderickx, G.

    Published in IEEE electron device letters (01-04-2002)
    “…Metal-insulator-metal (MIM) capacitors with PECVD nitride exhibit trap-induced dispersive behavior, which leads to degradation in capacitor linearity at low…”
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    Journal Article
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    High performance Ge pMOS devices using a Si-compatible process flow by Zimmerman, P., Nicholas, G., De Jaeger, B., Kaczer, B., Stesmans, A., Ragnarsson, L.-A., Brunco, D.P., Leys, F.E., Caymax, M., Winderickx, G., Opsomer, K., Meuris, M., Heyns, M.M.

    “…Ge pMOS mobilities up to 358 cm 2 /Vs are demonstrated using a Si-compatible process flow without the incorporation of strain. EOT is approximately 12 Aring…”
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    Conference Proceeding
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    Impact of EOT scaling down to 0.85nm on 70nm Ge-pFETs technology with STI by Mitard, J., Shea, C., DeJaeger, B., Pristera, A., Wang, G., Houssa, M., Eneman, G., Hellings, G., Wang, W.E., Lin, J.C., Leys, F.E., Loo, R., Winderickx, G., Vrancken, E., Stesmans, A., DeMeyer, K., Caymax, M., Pantisano, L., Meuris, M., Heyns, M.

    Published in 2009 Symposium on VLSI Technology (01-06-2009)
    “…For the first time, an STI module is integrated in an advanced 70 nm Ge-pFET technology allowing EOT scaling down to 0.85 nm. Gate leakage is kept below…”
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    Conference Proceeding
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    A 400GHz fMAX fully self-aligned SiGe:C HBT architecture by Van Huylenbroeck, S., Sibaja-Hernandez, A., Venegas, R., You, S., Winderickx, G., Radisic, D., Lee, W., Ong, P., Vandeweyer, T., Nguyen, N.D., De Meyer, K., Decoutere, S.

    “…An improved fully self-aligned SiGe:C HBT architecture featuring a single-step epitaxial collector-base process is described. An f MAX value of 400 GHz is…”
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    Conference Proceeding Web Resource
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    Integration of III-V on Si for High-Mobility CMOS by Waldron, N., Gang Wang, Ngoc Duy Nguyen, Orzali, T., Merckling, C., Brammertz, G., Ong, P., Winderickx, G., Hellings, G., Eneman, G., Caymax, M., Meuris, M., Horiguchi, N., Thean, A.

    “…In this paper we present results from an InGaAs/InP implant free quantum well device integrated fully in a Si CMOS processing line. The virtual InP substrates…”
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    Conference Proceeding
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    Selective Epitaxial Growth of GaAs on Ge Substrates with a SiO2 Pattern by Brammertz, G, Caymax, M, Mols, Y, Degroote, S, Leys, M, Van Steenbergen, J, Winderickx, G, Borghs, G, Meuris, M

    Published 26-03-2007
    “…Proceedings of the 210th Meeting of The Electrochemical Society, Cancun, Mexico, October 29-November 3, 2006 We have selectively grown thin epitaxial GaAs…”
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    Journal Article
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    Ge Deep Sub-Micron HiK/MG pFET with Superior Drive Compared to Si HiK/MG State-of-the-Art Reference by DeJaeger, B., Kaczer, B., Zimmerman, P., Opsomer, K., Winderickx, G., Van Steenbergen, J., Van Moorhem, E., Bonzom, R., Leys, F., Arena, C., Bauer, M., Werkhoven, C., Meuris, M., Heyns, M.

    “…This paper presents results on conventional, deep sub-micron short-channel Ge p-and nFET devices with a HiK/MG gate stack and NiGe source/drain regions. It is…”
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    Conference Proceeding
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    High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene by Jenei, S., Decoutere, S., Winderickx, G., Struyf, H., Tokei, Z., Vervoort, I., Vos, I., Jaenen, P., Carbonell, L., De Jaeger, B., Donaton, R.A., Vanhaelemeersch, S., Maex, K., Nauwelaers, B.

    “…Thick Cu single damascene inductors with very high Q factors are integrated on top of a standard aluminum 3LM BEOL process. Obtained Q factors are more than…”
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    Conference Proceeding
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