Search Results - "Wills, Laura A."

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    HYDROGEN-ROBUST SUBMICRON IrOx/Pb(Zr, Ti)O3/Ir CAPACITORS FOR EMBEDDED FERROELECTRIC MEMORY by Sakoda, T, Moise, T S, Summerfelt, S R, Colombo, L, Xing, G, Gilbert, S R

    “…Authors have demonstrated that the scaling of IrOx(Pb(Zr, Ti)O3:PZT)/Ir capacitors can be extended into the submicrometer regime. The submicrometer IrOx/PZT/Ir…”
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    Journal Article
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    Hydrogen-Robust Submicron IrO x /Pb(Zr, Ti)O 3 /Ir Capacitors for Embedded Ferroelectric Memory by Sakoda, Tomoyuki, Moise, Theodore S., Summerfelt, Scott R., Colombo, Luigi, Xing, Guoqiang, Gilbert, Stephen R., Loke, Alvin L. S., Ma, Shawming, Kavari, Rahim, Wills, Laura A., Amano, Jun

    Published in Japanese Journal of Applied Physics (01-04-2001)
    “…We have demonstrated that the scaling of IrO x (Pb(Zr, Ti)O 3 :PZT)/Ir capacitors can be extended into the submicron regime. The submicron IrO x /PZT/Ir…”
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    Journal Article
  4. 4

    High frequency electrical characterization of bst capacitors by Jammy, Rajmo, Wills, Laura A.

    Published in Integrated ferroelectrics (01-02-1997)
    “…We have characterized the dielectric properties of barium strontium titanate (Ba 1-x Sr x TiO 3 , x=0.5; BST) capacitors up to 5 GHz employing a simple, single…”
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    Journal Article
  5. 5

    The electrical properties of Ba1-x SrxTiO3 thin films grown by sputter deposition by Wills, Laura A., Schmitz, Thorsten, Reyes, Tina, Amano, Jun

    Published in Integrated ferroelectrics (01-09-1998)
    “…Ba 1-x Sr x TiO 3 (BST) thin films were deposited by reactive rf-magnetron sputtering onto Si substrates. The influence of the deposition parameters such as…”
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    Journal Article