Search Results - "Wills, Laura A."
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HYDROGEN-ROBUST SUBMICRON IrOx/Pb(Zr, Ti)O3/Ir CAPACITORS FOR EMBEDDED FERROELECTRIC MEMORY
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 4B, pp. 2911-2916. 2001 (2001)“…Authors have demonstrated that the scaling of IrOx(Pb(Zr, Ti)O3:PZT)/Ir capacitors can be extended into the submicrometer regime. The submicrometer IrOx/PZT/Ir…”
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The electrical properties of Ba 1-x Sr x TiO 3 thin films grown by sputter deposition
Published in Integrated ferroelectrics (01-09-1998)Get full text
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Hydrogen-Robust Submicron IrO x /Pb(Zr, Ti)O 3 /Ir Capacitors for Embedded Ferroelectric Memory
Published in Japanese Journal of Applied Physics (01-04-2001)“…We have demonstrated that the scaling of IrO x (Pb(Zr, Ti)O 3 :PZT)/Ir capacitors can be extended into the submicron regime. The submicron IrO x /PZT/Ir…”
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High frequency electrical characterization of bst capacitors
Published in Integrated ferroelectrics (01-02-1997)“…We have characterized the dielectric properties of barium strontium titanate (Ba 1-x Sr x TiO 3 , x=0.5; BST) capacitors up to 5 GHz employing a simple, single…”
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The electrical properties of Ba1-x SrxTiO3 thin films grown by sputter deposition
Published in Integrated ferroelectrics (01-09-1998)“…Ba 1-x Sr x TiO 3 (BST) thin films were deposited by reactive rf-magnetron sputtering onto Si substrates. The influence of the deposition parameters such as…”
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