Search Results - "Wiemer, Maik"
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Additive Manufacturing Technologies Compared: Morphology of Deposits of Silver Ink Using Inkjet and Aerosol Jet Printing
Published in Industrial & engineering chemistry research (21-01-2015)“…We report about a detailed comparison of the additive manufacturing methods inkjet printing (IJP) and aerosol jet printing (AJP). Both technologies are based…”
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Process Development of Aluminum Electroplating from an Ionic Liquid on 150 mm Wafer Level
Published in Micromachines (Basel) (01-06-2024)“…This paper focuses on the development of electroplating on 150 mm wafer level for microsystem technology applications from 1-Ethyl-3-methylimidazolium chloride…”
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Impact of Non-Accelerated Aging on the Properties of Parylene C
Published in Polymers (01-12-2022)“…The polymer Parylene combines a variety of excellent properties and, hence, is an object of intensive research for packaging applications, such as the direct…”
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Paradigm Changing Integration Technology for the Production of Flexible Electronics by Transferring Structures, Dies and Electrical Components from Rigid to Flexible Substrates
Published in Micromachines (Basel) (10-02-2023)“…Emerging trends like the Internet of Things require an increasing number of different sensors, actuators and electronic devices. To enable new applications,…”
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Aluminum Patterned Electroplating from AlCl₃⁻[EMIm]Cl Ionic Liquid towards Microsystems Application
Published in Micromachines (Basel) (12-11-2018)“…Electroplating process is being used to deposit a relatively thick film of metallic materials for various microsystems applications, such as for the…”
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Localized Induction Heating of Cu-Sn Layers for Rapid Solid-Liquid Interdiffusion Bonding Based on Miniaturized Coils
Published in Micromachines (Basel) (01-08-2022)“…Considering the demand for low temperature bonding in 3D integration and packaging of microelectronic or micromechanical components, this paper presents the…”
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Investigation of biocompatible Parylene as triboelectric layer for wearable energy harvesting
Published in Current directions in biomedical engineering (01-10-2021)“…Triboelectric nanogenerators (TENGs) are energy converters or energy harvesters that convert mechanical motion into electrical energy on the basis of their…”
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Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components
Published in Micromachines (Basel) (13-03-2019)“…We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning…”
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Investigation of Surface Pre-Treatment Methods for Wafer-Level Cu-Cu Thermo-Compression Bonding
Published in Micromachines (Basel) (15-12-2016)“…To increase the yield of the wafer-level Cu-Cu thermo-compression bonding method, certain surface pre-treatment methods for Cu are studied which can be exposed…”
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Aluminum–germanium wafer bonding of (AlGaIn)N thin-film light-emitting diodes
Published in Microsystem technologies : sensors, actuators, systems integration (01-05-2013)“…Eutectic aluminum–germanium wafer bonding was used to fabricate (AlGaIn)N thin-film light-emitting diodes (LEDs). Wafer bonding was carried out on 2″ wafer…”
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Inductive Heating Based on VHF-ISM Radio Band Frequencies as Technology Platform for Efficient Heating of Metallic Micro-Scaled Bonding Layers in MEMS Packaging
Published in IEEE transactions on magnetics (01-11-2023)“…This paper presents a technique for selective and energy-efficient induction heating of aluminum (Al) frames to support and enhance the thermocompression…”
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Low-Temperature Wafer Bonding Using Solid-Liquid Inter-Diffusion Mechanism
Published in Journal of microelectromechanical systems (01-12-2015)“…The low temperature joining of semiconductor substrates on wafer level by solid-liquid inter-diffusion bonding using the Cu/Ga and Au/In systems is…”
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Crack propagation in micro-chevron-test samples of direct bonded silicon-silicon wafers
Published in Frattura ed integritá strutturale (01-01-2011)“…Wafer bonding describes all technologies for joining two or more substrates directly or using certain intermediate layers. Current investigations are focused…”
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Aerosol Jet Printing of Nano Particle Based Electrical Chip Interconnects
Published in Materials today : proceedings (2015)“…Mask less fabricated 3D interconnects may have a big potential in future microelectronic applications by enhancing freedom of device design or power- and…”
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Wafer-Level Fabrication of Microcube-Typed Beam-Splitters by Saw-Dicing of Glass Substrate
Published in IEEE photonics technology letters (01-01-2014)“…This letter reports on the development of an integrated micro-optical beam splitter that can be array-arranged. The proposed wafer-level fabrication, based on…”
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Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates
Published in IEEE photonics technology letters (2014)“…This letter reports on the development of an integrated micro-optical beam splitter that can be array-arranged. The proposed wafer-level fabrication, based on…”
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Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation
Published in Biomedical optics express (01-03-2019)“…OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at…”
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Aluminum-Aluminum Wafer Level Thermo Compression Bonding Using Thick Electroplated Aluminum Bonding Frames
Published in 2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC) (11-09-2024)“…Wafer bonding is crucial in semiconductor manufacturing, integrating diverse materials and creating complex devices. Aluminum thermo-compression bonding (Al…”
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Conference Proceeding -
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Advances in Parylene Adhesive Bonding for the Realization of Biocompatible Microsystems
Published in 2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC) (11-09-2023)“…Wafer to wafer and chip to wafer bonding technologies are a key enabling processes for the fabrication of microsystems. The presented paper focuses on the…”
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Conference Proceeding -
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Aluminum―germanium wafer bonding of (AlGaIn)N thin-film light-emitting diodes : WaferBond'11, International Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration
Published in Microsystem technologies : sensors, actuators, systems integration (2013)Get full text
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