Search Results - "Wickenhauser, S."

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    Relaxation mechanism of low temperature SiGe/Si(0 0 1) buffer layers by Vescan, Lili, Wickenhäuser, Susanne

    Published in Solid-state electronics (01-08-2004)
    “…A detailed analysis is presented on relaxation mechanism of low temperature Si 1− x Ge x layers deposited on Si(0 0 1) by low pressure chemical vapor…”
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    Journal Article
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    Selectively grown vertical Si MOS transistor with reduced overlap capacitances by Klaes, D, Moers, J, Tönnesmann, A, Wickenhäuser, S, Vescan, L, Marso, M, Grabolla, T, Grimm, M, Lüth, H

    Published in Thin solid films (30-12-1998)
    “…Vertical p-MOS transistors with channel length of 130 nm have been fabricated using selective epitaxial growth (SEG) to define the channel region. The vertical…”
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    Journal Article Conference Proceeding
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    Determination of the activation energy for the heterogeneous nucleation of misfit dislocations in Si1−xGex/Si deposited by selective epitaxy by Wickenhäuser, S., Vescan, L., Schmidt, K., Lüth, H.

    Published in Applied physics letters (20-01-1997)
    “…Si 0.84 Ge 0.16 /Si heterostructures with variable finite lateral dimensions (10–300 μm) and different layer thicknesses grown by selective low pressure…”
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    Journal Article
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    Vertical p-MOSFETs with gate oxide deposition before selective epitaxial growth by Moers, J, Klaes, D, Tönnesmann, A, Vescan, L, Wickenhäuser, S, Grabolla, T, Marso, M, Kordoš, P, Lüth, H

    Published in Solid-state electronics (01-03-1999)
    “…A novel vertical MOSFET concept using selective epitaxial growth by low pressure chemical vapor deposition is proposed and the first p-channel device…”
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    Journal Article
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    Selective Epitaxial Growth of Si1-xGex for Device Applications and Nanostructures by Vescan, L., Loo, R., Dieker, C., Wickenhauser, S., Hartmann, A., Apetz, R.

    “…In this article several features of the selective epitaxial growth of SiGe by LPCVD are discussed, such as the pad size dependence of growth rate, composition…”
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    Conference Proceeding
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    Epitaxial growth by low pressure chemical vapour deposition of Si/sub 1-x/Ge/sub x//Si and applications by Vescan, L., Goryll, M., Grimm, K., Wickenhauser, S., Stoica, T.

    “…Low pressure chemical vapour deposition of Si and SiGe was investigated for novel devices for microelectronics and optoelectronics. Results on facet formation,…”
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    Conference Proceeding
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    Strain and misfit dislocation density in finite lateral size Si 1− x Ge x films grownby selective epitaxy by Holländer, B., Vescan, L., Mesters, S., Wickenhäuser, S.

    Published in Thin solid films (1997)
    “…Strain and misfit dislocation density in small-area Si 1− x Ge x filmsgrown by selective low-pressure chemical vapour deposition on Si (100)have been…”
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    Journal Article
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