Search Results - "Walk, Christian"
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1
A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer
Published in IEEE sensors journal (15-08-2018)“…In this paper, we present a capacitive, MEMS-based accelerometer comprising an ultra-low noise CMOS integrated readout-IC and a high-precision bulk micro…”
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Journal Article -
2
A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics
Published in Current directions in biomedical engineering (01-09-2019)“…A piezoelectric FPW-sensor has been developed for a point of care device in this work. The Bio- MEMS FPW-sensor consists of an electrode configuration termed…”
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Journal Article -
3
Origination of nano- and microstructures on large areas by interference lithography
Published in Microelectronic engineering (01-10-2012)“…[Display omitted] ► We originate micro- and nanostructures on large areas with interference lithography. ► Templates for large area polarization optical…”
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Journal Article Conference Proceeding -
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An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 μm CMOS
Published 22-08-2017“…In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure…”
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A high precision MEMS based capacitive accelerometer for seismic measurements
Published in 2017 IEEE SENSORS (01-10-2017)“…In this paper, we present a capacitive, MEMS based accelerometer comprising an ultra-low noise CMOS integrated readout-IC and a high precision bulk micro…”
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Conference Proceeding Web Resource -
6
An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS
Published in Journal of sensors and sensor systems (01-01-2017)“…In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure…”
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Journal Article -
7
Development of a Multi Channel Piezoelectric Flexural Plate Wave Biomems-Sensor for Rapid Point-of-Care Diagnostics
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…The Respiratory Syncytial Virus (RSV) is responsible for a high rate of post-neonatal deaths. An early diagnosis with accurate detection and forecast of…”
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Conference Proceeding -
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Hermeticity of SI1-XGEX Diaphragms for the Fabrication of a Capacitive Post-Cmos Pressure Sensor
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…In this work, the hermeticity of diaphragm structures is investigated and optimized. The diaphragms are developed for the monolithic post-CMOS integration of…”
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Conference Proceeding