Search Results - "WINCHESTER, K. J"

Monolithic integration of an infrared photon detector with a MEMS-based tunable filter by Musca, C.A., Antoszewski, J., Winchester, K.J., Keating, A.J., Nguyen, T., Silva, K.K.M.B.D., Dell, J.M., Faraone, L., Mitra, P., Beck, J.D., Skokan, M.R., Robinson, J.E.

“…The monolithic integration of a low-temperature microelectromechanical system (MEMS) and HgCdTe infrared detector technology has been implemented and…”
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Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers by Keating, A.J., Antoszewski, J., Silva, K.K.M.B.D., Winchester, K.J., Nguyen, T., Dell, J.M., Musca, C.A., Faraone, L., Mitra, P., Beck, J.D., Skokan, M.R., Robinson, J.E.

“…Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Pérot filter and a Hg x Cd 1– x Te-based infrared…”
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Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films by Huang, H., Winchester, K.J., Suvorova, A., Lawn, B.R., Liu, Y., Hu, X.Z., Dell, J.M., Faraone, L.

“…The effect of deposition conditions on characteristic mechanical properties – elastic modulus and hardness – of low-temperature PECVD silicon nitrides is…”
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A monolithically integrated HgCdTe short-wavelength infrared photodetector and micro-electro-mechanical systems-based optical filter by ANTOSZEWSEI, J, WINCHESTER, K. J, SKOKAN, M. R, ROBINSON, J. E, KEATING, A. J, NGUYEN, T, SILVA, K. K. M. B. D, MUSCA, C. A, DELL, J. M, FARAONE, L, MITRA, P, BECK, J. D

“…A monolithically integrated low-temperature micro-electro-mechanical systems (MEMS) and HgCdTe infrared (IR) detector technology is introduced, implemented,…”
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Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detector by Antoszewski, J., Winchester, K.J., Nguyen, T., Keating, A.J., Silva, K.K.M.B., Musca, C.A., Dell, J.M., Faraone, L.

“…The materials and processes for fabrication of monolithically integrated microelectromechanical systems-based microspectrometers operating in the…”
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Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films by HUANG, H, WINCHESTER, K. J, SUVOROVA, A, LAWN, B. R, LIU, Y, HU, X. Z, DELL, J. M, FARAONE, L

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Finite element analysis of tunable Fabry Perot MEMS structures by Winchester, K.J., Dell, J.M.

“…Finite element modelling of the mechanical response of MEMS structures is essential for device design and optimisation prior to any fabrication steps. We…”
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Nano-indentation characterisation of PECVD silicon nitride films by Winchester, K.J., Dell, J.M.

“…While finite element modelling (FEM) can be employed to optimise the displacement of the membrane structures to an applied electrostatic force, the accuracy of…”
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Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors by Huang, H., Liu, Y., Hu, X.Z., Bush, M.B., Winchester, K.J., Musca, C.A., Dell, J.M., Faraone, L.

“…Tunable Fabry-Perot (FP) filters have been recently used in MEMS devices, such as adaptive infrared detectors. The mechanical characteristics of these filters…”
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Dry plasma technology for in-situ vacuum processing of HgCdTe infrared photodetectors by Smith, E.P.G., Winchester, K.J., Musca, C.A., Dell, J.M., Faraone, L.

“…A fabrication procedure using dry plasma process technology has been developed for HgCdTe photoconductive detectors. Reactive ion etching (RIE) was used after…”
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Optical Performance of a MEMS Tunable IR Microspectrometer by Keating, A.J., Antoszewski, J., Silva, K.K.M.B.D., Winchester, K.J., Nguyen, T., Dell, J. M., Musca, C. A, Faraone, L.

“…The fabrication issues and optical performance of monolithically integrated microspectrometers are presented. The primary technical challenge in achieving the…”
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MEMS-based microspectrometers for infrared sensing by Musca, C.A., Antoszewski, J., Keating, A.J., Winchester, K.J., Silva, K.K.M.B.D., Nguyen, T., Dell, J.M., Faraone, L.

“…Micro-electro-mechanical systems (MEMS)-based tunable optical filters, integrated with an infrared detector, select narrow wavelength bands in either the…”
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Structural Materials for NEMS/MEMS Devices by Huang, H., Wu, Y.Q., Winchester, K.J., Suvorova, A., Dell, J.M., Zou, J., Faraone, L.

“…This paper reports the characterization of low temperature PECVD thin films as structural materials for NEMS/MEMS devices. Both silicon nitride and silicon…”
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Laser beam induced current characterisation of HgCdTe processed using plasma techniques by Park, B.A., Winchester, K.J., Musca, C.A., Dell, J.M., Faraone, L.

“…In this paper, laser beam induced current (LBIC) has been applied to the characterization of HgCdTe n-on-p junctions fabricated through plasma induced type…”
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