Detection of thermal waves through optical reflectance

We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin...

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Bibliographic Details
Published in:	Applied physics letters Vol. 46; no. 11; pp. 1013 - 1015
Main Authors:	ROSENCWAIG, A, OPSAL, J, SMITH, W. L, WILLENBERG, D. L
Format:	Journal Article
Language:	English
Published:	Melville, NY American Institute of Physics 01-06-1985
Subjects:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Thermal instruments, apparatus and techniques Thickness Measurement Thermal properties Thermal method Wave detection Properties of materials Thermal wave Measurement method Optical reflection Reflectance Thin film
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Summary:	We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.95794