Search Results - "Viravaux, L."

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    22FD-SOI Variability Improvement Thanks to SmartCut Thickness Control at Atomic Scale by Schwarzenbach, W., Loubriat, L., Joseph, V., Viravaux, L., Moreau, O., Lasserre, S., Nguyen, B.-Y.

    “…Beyond 65FD-SOI, 28FD-SOI, 22FD-SOI production granted technologies, continuous SmartCut TM development support advanced SOI requirements. To improve SOI layer…”
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    Conference Proceeding
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