Search Results - "Villarrubia, J S"

On Low-Energy Tail Distortions in the Detector Response Function of X-Ray Microcalorimeter Spectrometers by O’Neil, G. C., Szypryt, P., Takacs, E., Tan, J. N., Buechele, S. W., Naing, A. S., Joe, Y. I., Swetz, D., Schmidt, D. R., Doriese, W. B., Gard, J. D., Reintsema, C. D., Ullom, J. N., Villarrubia, J. S., Ralchenko, Yu

“…We use narrow spectral lines from the X-ray spectra of various highly charged ions to measure low-energy tail-like deviations from a Gaussian response function…”
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Scanning electron microscope dimensional metrology using a model-based library by Villarrubia, J. S., Vladár, A. E., Postek, M. T.

“…The semiconductor electronics industry places significant demands upon secondary electron imaging to obtain dimensional measurements that are used for process…”
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Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation by Villarrubia, J S

“…To the extent that tips are not perfectly sharp, images produced by scanned probe microscopies (SPM) such as atomic force microscopy and scanning tunneling…”
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Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library by Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.

“…The width and shape of 10nm to 12nm wide lithographically patterned SiO2 lines were measured in the scanning electron microscope by fitting the measured…”
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Experimental test of blind tip reconstruction for scanning probe microscopy by Dongmo, L.S., Villarrubia, J.S., Jones, S.N., Renegar, T.B., Postek, M.T., Song, J.F.

“…Determination of the tip geometry is a prerequisite to converting the scanning probe microscope (SPM) from a simple imaging instrument to a tool that can…”
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Blind estimation of general tip shape in AFM imaging by Tian, Fenglei, Qian, Xiaoping, Villarrubia, J.S.

“…The use of flared tip and bi-directional servo control in some recent atomic force microscopes (AFM) has made it possible for these advanced AFMs to image…”
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Research Update: Electron beam-based metrology after CMOS by Liddle, J. A., Hoskins, B. D., Vladár, A. E., Villarrubia, J. S.

“…The magnitudes of the challenges facing electron-based metrology for post-CMOS technology are reviewed. Directed self-assembly, nanophotonics/plasmonics, and…”
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General three-dimensional image simulation and surface reconstruction in scanning probe microscopy using a dexel representation by Qian, Xiaoping, Villarrubia, J.S.

“…The ability to image complex general three-dimensional (3D) structures, including reentrant surfaces and undercut features using scanning probe microscopy, is…”
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Electron beam-based metrology after CMOS by Liddle, J A, Hoskins, B D, Vladár, A E, Villarrubia, J S

“…The magnitudes of the challenges facing electron-based metrology for post-CMOS technology are reviewed. Directed selfassembly, nanophotonics/plasmonics, and…”
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Identification of the Products from the Reaction of Chlorine with the Silicon(111)-(7 × 7) Surface by Boland, John J., Villarrubia, J. S.

“…The various products from the reaction of chlorine (Cl) with the adatom layer of the Si(111)-(7 × 7) surface have been identified with scanning tunneling…”
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Scanned probe microscope tip characterization without calibrated tip characterizers by Villarrubia, J. S.

“…In scanned probe microscopy the image is a combination of information from the sample and the tip. In order to reconstruct the true surface geometry, it is…”
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Scanning-tunneling-microscopy study of the Si(111)-7×7 rest-atom layer following adatom removal by reaction with Cl by VILLARRUBIA, J. S, BOLAND, J. J

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Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library by Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.

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On low-energy tail distortions in the detector responsefunction of x-ray microcalorimeter spectrometers by O'Neil, G. C, Szypryt, P, Takacs, E, Tan, J. N, Buechele, S. W, Naing, A. S, Joe, Y. I, Swetz, D, Schmidt, D. R, Doriese, W. B, Gard, J. D, Reintsema, C. D, Ullom, J. N, Villarrubia, J. S, Ralchenko, Yu

“…We use narrow spectral lines from the x-ray spectra of various highlycharged ions to measure low-energy tail-like deviations from a Gaussian responsefunction…”
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Observation of significant nitrogen–oxygen bond weakening in nitric oxide on Rh(100) by Villarrubia, J. S., Richter, Lee J., Gurney, Bruce A., Ho, W.

“…An EELS spectrometer equipped with a multichannel detector for fast data acquisition was employed to study the interaction of nitric oxide with the Rh(100)…”
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Formation of Si(111)-(1×1)Cl by BOLAND, J. J, VILLARRUBIA, J. S

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Nanoindentation of polymers: an overview by VanLandingham, Mark R., Villarrubia, John S., Guthrie, William F., Meyers, Greg F.

“…In this paper, the application of instrumented indentation devices to the measurement of the elastic modulus of polymeric materials is reviewed. This review…”
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Increasing the value of atomic force microscopy process metrology using a high‐accuracy scanner, tip characterization, and morphological image analysis by Schneir, J., Villarrubia, J. S., McWaid, T. H., Tsai, V. W., Dixson, R.

“…Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass…”
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Advanced electron microscopy needs for nanotechnology and nanomanufacturing by Postek, Michael T., Villarrubia, John S., Vladár, András E.

“…Advances in fundamental nanoscience, design of nanomaterials, and ultimately manufacturing of nanometer scale products all depend to some degree on the…”
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Summary Abstract: The kinetics of CO dissociation on Fe(111) by Whitman, L. J., Gurney, B. A., Richter, L. J., Villarrubia, J. S., Ho, W.

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