Search Results - "Verdot, T."

Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR by Mollard, L, Riu, J, Royo, S, Dieppedale, C, Hamelin, A, Koumela, A, Verdot, T, Frey, L, Le Rhun, G, Castellan, G, Licitra, C

“…This paper presents the fabrication and characterization of a biaxial MEMS (MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which…”
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Downsizing and Silicon Integration of Photoacoustic Gas Cells by Glière, A., Barritault, P., Berthelot, A., Constancias, C., Coutard, J.-G., Desloges, B., Duraffourg, L., Fedeli, J.-M., Garcia, M., Lartigue, O., Lhermet, H., Marchant, A., Rouxel, J., Skubich, J., Teulle, A., Verdot, T., Nicoletti, S.

“…Downsizing and compatibility with MEMS silicon foundries is an attractive path towards a large diffusion of photoacoustic trace gas sensors. As the…”
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50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability by Gadola, M., Maspero, F., Langfelder, G., Sansa, M., Verdot, T., Berthelot, A., Robert, P.

“…The paper discusses the design and performance of mode-split MEMS gyroscopes, based on NEMS piezoresistive detection, as a function of the frequency of the…”
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Optimisation, design and characterisation of a piezoelectric micro suspension by Verdot, T., Collet, M., Muralt, P.

“…A piezoelectric micro active suspension device has been developed for the application of active isolation of sensitive electronic devices such as frequency…”
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600 µdps / √Hz, 1.2 mm2 MEMS Pitch Gyroscope by Gadola, M., Perna, M. Sansa, Allieri, M., Robert, P., Verdot, T., Berthelot, A., Langfelder, G.

“…The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk (ARW of 600 \mu \textbf{dps}/\sqrt{\textbf{Hz}}) and lowest bias…”
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High-damped accelerometer based on squeeze-film damping and piezoresistive nanogauge detection for vibrating environments by Fain, B., Chaehoi, A., Berthelot, A., Verdot, T., Souchon, F., Delachanal, S., Koumela, A., Nowodzinski, A., Lhermet, H., Jourdan, G., Rey, P., Robert, P.

“…This paper reports the conception, the fabrication and the electrical testing of an overdamped silicon accelerometer dedicated to vibrating environments…”
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New architecture of MEMS microphone for enhanced performances by Czarny, J., Walther, A., Desloges, B., Robert, Ph, Redon, E., Verdot, T., Ege, K., Guianvarc'h, C., Guyader, J. L.

“…This paper describes the conception, designs consideration and fabrication process of a novel MEMS microphone. The presented microphone not only uses a new…”
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