Search Results - "Veijola, T."
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1
Compact damping models for laterally moving microstructures with gas-rarefaction effects
Published in Journal of microelectromechanical systems (01-06-2001)“…Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. In the first part of the paper, a…”
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2
Synthesis of Reduced Equivalent Circuits for Transmission Lines
Published in IEEE transactions on circuits and systems. I, Regular papers (01-10-2006)“…This paper presents a method for generating lumped models for symmetrical transmission-line two-ports. These models consist of an ideal transformer and…”
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3
Gas damping model for a RF MEM switch and its dynamic characteristics
Published in 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) (2002)“…A compact model for a capacitive RF MEM switch with damping is presented. The damping model is based on analytic expressions for flow resistances due to the…”
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4
Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method
Published in 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017) (2000)“…Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary…”
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5
Numerical and compact modelling of squeeze-film damping in RF MEMS resonators
Published in 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (01-04-2008)“…Oscillatory gas flow in squeeze-film dampers is studied up to frequencies where the length of the acoustic wave is comparable with the dimensions of the air…”
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6
Compact model for a cantilever beam MEM contact switch
Published in Proceedings of the 2005 European Conference on Circuit Theory and Design, 2005 (2005)“…A compact model for a cantilever beam microelectromechanical (MEM) contact switch is constructed. The beam deflection is modeled by discretizing the beam along…”
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7
Comparison between damping coefficients of measured perforated structures and compact models
Published in 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (01-04-2008)“…Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact…”
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8
Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
Published in Sensors and actuators. A. Physical. (30-05-1995)“…We present a new electric equivalent circuit for the forces created by a squeezed gas film between vertically moving planar surfaces. The model is realized…”
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Model for thermal spreading impedance in GaAs MESFETs
Published in Proceedings of Third International Conference on Electronics, Circuits, and Systems (1996)“…A simulation model for dynamic temperature response in GaAs MESFET structures is presented. In the model, the heated volumes below the gate fingers are…”
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10
Identification of cascaded microwave circuits with moderate reflections using reflection and transmission measurements
Published in IEEE transactions on microwave theory and techniques (01-02-1988)“…A method for identifying the component values of a cascaded microwave circuit with the aid of the time-domain reflection and transmission coefficients is…”
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11
The influence of gas-surface interaction on gas-film damping in a silicon accelerometer
Published in Sensors and actuators. A, Physical (01-04-1998)“…A mathematical model for the effective viscosity of a gas film in small air gaps between silicon and metal surfaces is presented. The model is based on the…”
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12
Simple but Accurate Models for Squeeze-film Dampers
Published in 2007 IEEE Sensors (01-10-2007)“…Simple but accurate compact models are derived for squeeze-film dampers having rectangular areas and vibrating in translational or in torsion motion. First,…”
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13
Model of capacitive micromechanical accelerometer including effect of squeezed gas film
Published in 1995 IEEE International Symposium on Circuits and Systems (ISCAS) (1995)“…An electrical component model for a micromechanical accelerometer is presented. In addition to the varying capacitances, the motion of the seismic mass and the…”
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14
Model for gas film damping in a silicon accelerometer
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…A mathematical model for the effective viscosity of a gas film in small air gaps between silicon-metal surfaces is presented. The model is based on the…”
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15
Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method
Published in International journal of RF and microwave computer-aided engineering (01-09-2001)“…A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its…”
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16
Transient capacitance measurement of MEM capacitor
Published in Sensors and actuators. A. Physical. (14-01-2005)“…Previously, steady-state measurement methods have been used to characterize micro-electro-mechanical (MEM) capacitor performance during reliability testing and…”
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17
Compressible squeeze-films in vibrating MEMS structures at high frequencies
Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01-04-2009)“…A simple model is presented to approximate the damping due to gas in vibrating MEMS squeeze-film structures at high frequencies. The model is based on the…”
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Conference Proceeding -
18
3D FEM simulations of perforated MEMS gas dampers
Published in 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (01-04-2009)“…A 3D Navier-Stokes FEM solver was used to study the damping forces due to air flow in a perforated damper in translational motion normal to surfaces. Several…”
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19
Quality Factor and Resonance Frequency Shift Due to Air in RF MEMS Radial Disk Resonators
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01-06-2007)“…Damping due to air in RF MEMS disk resonators is studied with simulations. The fluid flow in the air gaps and around the oscillating structure is studied with…”
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Conference Proceeding -
20
Dynamic simulation model for a vibrating fluid density sensor
Published in Sensors and actuators. A, Physical (30-08-1999)“…A dynamic simulation model for a vibrating fluid density sensor is presented. The model includes electrostatic excitation, two torsional and two bending…”
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