Search Results - "Veeger, C. P. L."
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Predicting Cycle Time Distributions for Integrated Processing Workstations: An Aggregate Modeling Approach
Published in IEEE transactions on semiconductor manufacturing (01-05-2011)“…To predict cycle time distributions of integrated processing workstations, detailed simulation models are almost exclusively used; these models require…”
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Journal Article -
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Generating Cycle Time-Throughput Curves Using Effective Process Time Based Aggregate Modeling
Published in IEEE transactions on semiconductor manufacturing (01-11-2010)“…In semiconductor manufacturing, cycle time-throughput (CT-TH) curves are often used for planning purposes. To generate CT-TH curves, detailed simulation models…”
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Journal Article -
3
Lumped parameter modelling of the litho cell
Published in Production planning & control (01-01-2011)“…Litho cells are the most expensive equipment in a wafer fab. To support decision-making on this equipment, accurate simulation models for throughput and cycle…”
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Journal Article -
4
Aggregate modeling of semiconductor equipment using effective process times
Published in Proceedings of the 2011 Winter Simulation Conference (WSC) (01-12-2011)“…Performance evaluation using queueing models is common practice in semiconductor manufacturing. Analytical closed-form expressions and simulation models are…”
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Conference Proceeding -
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Predicting the mean cycle time as a function of throughput and product mix for cluster tool workstations using EPT-based aggregate modeling
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01-05-2009)“…Predicting the mean cycle time as a function of throughput and product mix is helpful in making the production planning for cluster tools. To predict the mean…”
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Conference Proceeding -
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Generating Cycle Time-Throughput Curves using Effective Process Time based Aggregate Modeling
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01-05-2008)“…In semiconductor manufacturing, cycle time-throughput (CT-TH) curves are often used to make a trade-off between throughput and mean cycle time of bottleneck…”
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Conference Proceeding