Search Results - "Vangoidsenhoven, D."

Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers by Van Damme, J., Massar, S., Acharya, R., Ivanov, Ts, Perez Lozano, D., Canvel, Y., Demarets, M., Vangoidsenhoven, D., Hermans, Y., Lai, J. G., Vadiraj, A. M., Mongillo, M., Wan, D., De Boeck, J., Potočnik, A., De Greve, K.

“…The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers 1 , 2 . As the complexity of…”
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248nm and 193nm lithography for damascene patterning by Maenhoudt, Mireille, Pollentier, Ivan, Wiaux, Vincent, Vangoidsenhoven, Diziana, Ronse, Kurt

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