Search Results - "Van Delden, M.H.W.M."
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Elimination of accumulation charge effects for high-resistive silicon substrates
Published in ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003 (2003)“…A dedicated silicon process, called PASSI/spl trade/, was developed for passive functions in the GHz regime. The process, using high-resistive silicon with a…”
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Conference Proceeding
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Passive integration on Si for RF circuits in wireless applications
Published in 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282) (1999)“…A technology is described for the integration of high quality factor inductors and capacitors on high ohmic silicon. The performance is optimised for resonator…”
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Conference Proceeding Journal Article -
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Reliability and electric properties for PECVD a-SiN/sub x/:H films with an optical band-gap ranging from 2.5 to 5.38 eV
Published in 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual (2003)“…The reliability and electrical properties for PECVD a-SiN/sub x/:H films with an optical band-gap ranging from 2.5 to 5.38 eV have been investigated. The…”
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Conference Proceeding