Search Results - "VAN DELFT, FCMJM"
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1
The influence of nanoscale topographical cues on initial osteoblast morphology and migration
Published in European cells & materials (09-11-2010)“…The natural environment of a living cell is not only organized on a micrometer, but also on a nanometer scale. Mimicking such a nanoscale topography in…”
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2
The threshold at which substrate nanogroove dimensions may influence fibroblast alignment and adhesion
Published in Biomaterials (01-09-2007)“…Abstract The differences in morphological behaviour between fibroblasts cultured on smooth and nanogrooved substrata (groove depth: 5–350 nm, width: 20–1000…”
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3
Manufacturing substrate nano-grooves for studying cell alignment and adhesion
Published in Microelectronic engineering (01-05-2008)“…Nano-scale pattern templates have been manufactured in order to study the differences in cell behaviour between fibroblasts cultured on smooth and on grooved…”
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Journal Article Conference Proceeding -
4
Nanoscale electrode gaps to study single molecule conduction
Published in Microelectronic engineering (01-08-2011)“…The fabrication of electrode pairs with a small electrode gap separation using a focussed-ion-beam is reported. Using a previously developed technique, the gap…”
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5
Image reversal revisited
Published in Microelectronic engineering (01-05-2008)“…Image reversal methods can be useful in those cases, where a resist of a specific tone is lacking particular desirable properties, e.g. etch resistance…”
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6
Hydrogen SilsesQuioxane, a high-resolution negative tone e-beam resist, investigated for its applicability in photon-based lithographies
Published in Microelectronic engineering (01-07-2002)“…Hydrogen SilsesQuioxane (HSQ) has previously been shown to behave as a high-resolution negative tone inorganic e-beam resist, giving single lines less than 10…”
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7
Micro-contact printing on oxide surfaces for model catalysts using e-beam written masters in hydrogen silsesquioxane
Published in Microelectronic engineering (01-06-2004)“…In order to make model catalysts for fundamental research in heterogeneous catalysis, carrier oxide surfaces with well-defined properties are needed…”
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8
Silicon-containing copolymers of MMA tested for a positive-tone high-resolution bi-layer e-beam resist system
Published in Microelectronic engineering (01-03-2005)“…Copolymers of methylmethacrylate (MMA) and trimethylsilyl-methylmethacrylate (SiMMA) in various molar ratios have been synthesised and characterised for use as…”
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9
Bilayer resist used in e-beam lithography for deep narrow structures
Published in Microelectronic engineering (1999)“…A bilayer reist system developed by Olin Microelectronic Materials, consisting of a UV curable polystyrene bottom coat and a silicon loaded UV sensitive…”
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10
Classification of impact-assisted etch mechanisms
Published in Microelectronic engineering (01-03-1998)“…Previously, a mechanistic framework has been constructed for impact-assisted etch reactions in e.g. Reactive Ion Etching. The consecutive reaction steps…”
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11
DUV resists in negative tone high resolution electron beam lithography
Published in Microelectronic engineering (1999)“…Shipley's chemically amplified DUV resists UVN-2 (negative tone) and UV-5 (positive tone) have been studied for their high resolution capabilities in electron…”
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Journal Article Conference Proceeding -
12
Comparison of negative tone resists NEB22 and UVN30 in e-beam lithography
Published in Microelectronic engineering (01-06-2000)“…The negative tone resists NEB22 and UVN30 have been studied for their contrast and resolution in e-beam lithography, as well as in 248 nm DUV lithography…”
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13
Submicron YBa2Cu3O(7-delta)-Ag-YBa2Cu3O(7-delta) superconducting proximity junctions
Published in Applied physics letters (02-09-1991)“…A deep submicron structuring process for oxide superconducting films has been used to fabricate planar YBa2Cu3O(7-delta)-Ag-YBa2Cu3O(7-delta) proximity…”
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14
Development of a 100 nm gate power HEMT using four-layer resist and flexible e-beam exposure strategies
Published in Microelectronic engineering (01-02-1997)“…A 100 nm gate length power HEMT has been fabricated, which can be applied in power amplifiers throughout the millimeter-wave spectrum, as well as in very low…”
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15
Hydrogen silsesquioxane/novolak bilayer resist for high aspect ratio nanoscale electron-beam lithography
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2000)“…A bilayer resist system, consisting of hydrogen silsesquioxane (HSQ) as negative tone electron (e)-beam resist top coat and hard baked novolak resist as bottom…”
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16
Delay-time and aging effects on contrast and sensitivity of hydrogen silsesquioxane
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2002)“…Hydrogen silsesquioxane (HSQ) has been shown to behave as a negative tone inorganic e-beam resist with a resolution better than 20 nm established. In this…”
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17
Composition and Properties of Platinum–Rhodium Alloy Surfaces
Published in ISIJ International (01-01-1989)“…The use of Pt–Rh based three-way catalysts for automotive exhaust gas control stimulated us to study the surface composition and surface properties of various…”
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18
Plasma etch mechanistic framework used for tribochemical reactions
Published in Journal of materials science letters (15-09-1994)“…The mechanistic framework, previously used for plasma etching can also be applied to tribochemical processes. Although the impact processes in plasma etching…”
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19
Method for manufacturing nanoscale structures in transition metal layers
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-2002)“…In most transition metals, steeply profiled nanoscale structures can not easily be obtained by dry etching, due to the redeposition of the etch products. An…”
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