Search Results - "VALLEE, Christophe"

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition by Vallée, Christophe, Bonvalot, Marceline, Belahcen, Samia, Yeghoyan, Taguhi, Jaffal, Moustapha, Vallat, Rémi, Chaker, Ahmad, Lefèvre, Gautier, David, Sylvain, Bsiesy, Ahmad, Possémé, Nicolas, Gassilloud, Rémy, Granier, Agnès

“…In this paper, the emerging role of ionic species in plasma assisted chemical deposition processes is discussed in detail for commemorating the Career of John…”
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50 Years of Reactive Ion Etching in Microelectronics by Voronin, Sergey, Vallee, Christophe

“…In this short review, the evolution of plasma etching technologies used in microelectronics fabrication since the discovery of the reactive ion etching process…”
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Sorbic Acid as a Renewable Resource for Atom-Economic and Selective Production of p‑Toluic Acid and Alkyl‑p‑Toluates: Intermediates to Bioterephthalic Acid and Esters by Bérard, Sandrine, Vallée, Christophe, Delcroix, Damien

“…A new pathway for the production of p-toluic acid and alkyl-p-toluates is described here, starting from industrially relevant but underexploited renewable…”
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Study of selective etching of TaN with respect to SiOCH dielectrics using SiF4 plasma processes by Otto IV, Ivo, Valleé, Christophe

“…TaN is used as a Cu diffusion barrier during metal interconnect formation to enable modern chip fabrication. In this study, the selective removal of TaN with…”
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A new methodology of non-destructive testing in a set of two parallel immersed plates using time reversal process and leaky Lamb waves by Vallée, Jean-Christophe, Ploix, Marie-Aude, Cavaro, Matthieu, Chaix, Jean-François

“…Ultrasound has been identified as a suitable method for inspecting complex structures (such as nuclear reactors), as it can propagate through both liquids and…”
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Innovative Low-Power Self-Nanoconfined Phase-Change Memory by Serra, Anna Lisa, Lefevre, Gauthier, Bourgeois, Guillaume, Sabbione, Chiara, Castellani, Niccolo', Cueto, Olga, Cyrille, Marie-Claire, Bernard, Mathieu, Garrione, Julien, Bernier, Nicolas, Vallee, Christophe, David, Sylvain, Charpin-Nicolle, Christelle, Navarro, Gabriele, Nowak, Etienne

“…In this article, we demonstrate at array level and in industrial-like devices, the extreme scaling down to nanometric dimensions of the phase-change memory…”
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FTIR as a simple tool to quantify unconverted lignin from chars in biomass liquefaction process: Application to SC ethanol liquefaction of pine wood by Bui, Ngoc Quynh, Fongarland, Pascal, Rataboul, Franck, Dartiguelongue, Cyril, Charon, Nadège, Vallée, Christophe, Essayem, Nadine

“…Lignin in solid residues produced from wood liquefaction can be quantified by FTIR analysis. This is applied to investigate pine wood liquefaction in…”
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Controlling the Current Conduction Asymmetry of HfO 2 Metal–Insulator–Metal Diodes by Interposing Al 2 O 3 Layer by Jeon, Woojin, Salicio, Olivier, Chaker, Ahmad, Gonon, Patrice, Vallee, Christophe

“…Metal-insulator-metal (MIM) diodes with bulk-limited current conduction asymmetry employing interposed Al 2 O 3 layer in 6-nm-thick HfO 2 film have been…”
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Reaction Intermediates in the Synthesis of New Hydrido, N-Heterocyclic Dicarbene Iridium(III) Pincer Complexes by Raynal, Matthieu, Pattacini, Roberto, Cazin, Catherine S. J, Vallée, Christophe, Olivier-Bourbigou, Hélène, Braunstein, Pierre

“…The reactivity of the potential pincer ligands (1,3-phenylene)bis(1-butylimidazolium) diiodide ( n-Bu(CHimidCHCHimid)I2, 1) and…”
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Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO2 Using Trivinylmethoxysilane and Oxygen Plasma by Nguyen, Viet Huong, Sekkat, Abderrahime, Masse de la Huerta, César Arturo, Zoubian, Fadi, Crivello, Chiara, Rubio-Zuazo, Juan, Jaffal, Moustapha, Bonvalot, Marceline, Vallée, Christophe, Aubry, Olivier, Rabat, Hervé, Hong, Dunpin, Muñoz-Rojas, David

“…SiO2 constitutes one of the most widely used dielectric materials in the microelectronics, packaging, and optical industries. Therefore, the development of new…”
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Demonstrating the Ultrathin Metal–Insulator– Metal Diode Using TiN/ZrO 2 –Al 2 O 3 –ZrO 2 Stack by Employing RuO 2 Top Electrode by Jeon, Woojin, Kim, Youngjin, An, Cheol Hyun, Hwang, Cheol Seong, Gonon, Patrice, Vallee, Christophe

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Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V by PIALLAT, Fabien, BEUGIN, Virginie, GASSILLOUD, Remy, DUSSAULT, Laurent, PELISSIER, Bernard, LEROUX, Charles, CAUBET, Pierre, VALLEE, Christophe

“…Plasma enhanced atomic layer deposition (PEALD) TaCN deposited on HfO2 was studied by X-ray photoelectron spectroscopy (XPS) to understand the reactions taking…”
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Wide Band Frequency Characterization of Al-Doped and Undoped Rutile TiO 2 Thin Films for MIM Capacitors by Chaker, Ahmad, Bermond, Cedric, Artillan, Philippe, Gonon, Patrice, Vallee, Christophe, Bsiesy, Ahmad

“…In this letter, the dielectric properties of rutile TiO2 thin films are studied for metal-insulator-metal capacitor applications. The dielectric constant, the…”
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A Link Between CBRAM Performances and Material Microscopic Properties Based on Electrical Characterization and Atomistic Simulations by Nail, Cecile, Molas, Gabriel, Blaise, Philippe, Sklenard, Benoit, Berthier, Remy, Bernard, Mathieu, Perniola, Luca, Ghibaudo, Gerard, Vallee, Christophe

“…In this paper, we investigate the link between various resistive memory (RRAM) electrical characteristics: endurance, window margin (WM), and retention. For…”
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Edge and Notch Detection in a Plate Using Time Reversal Process of Leaky Lamb Waves by Vallée, Jean-Christophe, Ploix, Marie-Aude, Baqué, François, Cavaro, Matthieu, Chaix, Jean-François

“…Leaky Lamb waves are proven effective to carry out nondestructive testing especially on parallel and immersed plates. To detect and localize defects in such a…”
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Durability analysis of the maritime infrastructure for the Monaco Sea extension by Crémona, Christian, Jeusset, Matthieu, Vallée, Christophe, Zouhny, Basma

“…The construction of an artificial peninsula extending the Monaco territory is destined to create an urban area of 6 ha. The preliminary works started end 2016,…”
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An unprecedented, figure-of-eight, dinuclear iridium(I) dicarbene and new iridium(III) 'pincer' complexes by Raynal, Matthieu, Cazin, Catherine S J, Vallée, Christophe, Olivier-Bourbigou, Hélène, Braunstein, Pierre

“…An unusual dinuclear Ir(I) complex bridged by two N-heterocyclic biscarbene ligands, forming a 20-membered, figure-of-eight dimetallacycle, and new CNHCCCNHC…”
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Remarkable Base Effect in the Synthesis of Mono- and Dinuclear Iridium(I) NHC Complexes by Raynal, Matthieu, Cazin, Catherine S. J, Vallée, Christophe, Olivier-Bourbigou, Hélène, Braunstein, Pierre

“…Several [(2-R1-1,3-phenylene)bis(methylene)]bis(1-R2-imidazolium) salts, of general formula R2(CHimid ∧CR1 ∧CHimid)X2, have been synthesized by classical…”
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Investigation of the Reactivity of Hydroxyborate Salts with Group IV Metal Complexes: Synthesis and Structural Characterization of the Zirconium and Hafnium Ionic Complexes [PPN]+[Cp2MMe(OB(C6F5)3)] by Kelsen, Vinciane, Vallée, Christophe, Jeanneau, Erwann, Bibal, Christine, Santini, Catherine C, Chauvin, Yves, Olivier-Bourbigou, Hélène

“…The syntheses of some novel fluorinated and nonfluorinated hydroxyborate salts, [Q]+[HOB(C6F5)3]− and [Q]+[HOBPh3]− ([Q]+ = aprotic cation), are reported. The…”
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Evaluation of plasma parameters on PEALD deposited TaCN by Piallat, Fabien, Beugin, Virginie, Gassilloud, Remy, Michallon, Philippe, Dussault, Laurent, Pelissier, Bernard, Asikainen, Timo, Maes, Jan Willem, Martin, François, Morin, Pierre, Vallée, Christophe

“…[Display omitted] ► Tuning TaCN deposited material from TaN-like to TaC-like was possible using plasma. ► Influence of plasma power on TaCN properties is…”
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