Search Results - "Urabe, Keiichiro"

Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method by Hamano, Takashi, Matsuda, Takayuki, Asamoto, Yuya, Noma, Masao, Hasegawa, Shigehiko, Yamashita, Michiru, Urabe, Keiichiro, Eriguchi, Koji

“…The optical constants of boron nitride (BN) films on Si substrates were systematically investigated using spectroscopic ellipsometry. BN films with a wide…”
Get full text

Characterization of the distribution of defects introduced by plasma exposure in Si substrate by Sato, Yoshihiro, Shibata, Satoshi, Uedono, Akira, Urabe, Keiichiro, Eriguchi, Koji

“…Defects in a silicon (Si) substrate induced by plasma exposure—plasma-induced damage (PID)—were investigated using various techniques. The authors performed a…”
Get full text

Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser by Urabe, Keiichiro, Sakai, Osamu

“…Optical frequency combs have the potential to be applied not only to frequency metrology but also to various spectroscopic measurements replacing incoherent…”
Get full text

Improvement of the plasma‐induced defect generation model in Si substrates and the optimization design framework by Eriguchi, Koji, Hamano, Takashi, Urabe, Keiichiro

“…Defect generation in Si substrates during plasma processing—plasma‐induced physical damage (PPD)—has been principally modeled on the basis of the projection…”
Get full text

Characterization of surface modification mechanisms for boron nitride films under plasma exposure by Higuchi, Tomoya, Noma, Masao, Yamashita, Michiru, Urabe, Keiichiro, Hasegawa, Shigehiko, Eriguchi, Koji

“…The surface modification of a boron nitride (BN) film by plasma exposure was investigated by means of nanoindentation analyses and molecular dynamics…”
Get full text

Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid by Kato, Toru, Stauss, Sven, Kato, Satoshi, Urabe, Keiichiro, Baba, Motoyoshi, Suemoto, Tohru, Terashima, Kazuo

“…Pulsed laser ablation of solids in supercritical media has a large potential for nanomaterials fabrication. We investigated plasmas generated by pulsed laser…”
Get full text

Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor by Ishii, Chikako, Stauss, Sven, Kuribara, Koichi, Urabe, Keiichiro, Sasaki, Takehiko, Terashima, Kazuo

“…Diamond molecules, so-called “diamondoids”, have shown a high potential for various nanotechnology applications, however the elaboration—especially of larger…”
Get full text

Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage by Sato, Yoshihiro, Shibata, Satoshi, Yamada, Takayoshi, Nishimura, Kazuko, Yamasaki, Masayuki, Murakami, Masashi, Urabe, Keiichiro, Eriguchi, Koji

“…In the design of ultralow leakage devices such as image sensors, it is necessary to understand the influence of low-density defects during plasma…”
Get full text

Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas by Urabe, Keiichiro, Muneoka, Hitoshi, Stauss, Sven, Sakai, Osamu, Terashima, Kazuo

“…Cryoplasmas, which are plasmas whose gas temperatures are below room temperature (RT), have shown dynamic changes in their physical and chemical…”
Get full text

Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure by Urabe, Keiichiro, Ito, Yosuke, Sakai, Osamu, Tachibana, Kunihide

“…We have investigated the discharge mechanisms in a helium plasma jet with a coaxial dielectric barrier discharge (DBD) configuration, which can generate…”
Get full text

Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere by Tomita, Kentaro, Urabe, Keiichiro, Shirai, Naoki, Sato, Yuta, Hassaballa, Safwat, Bolouki, Nima, Yoneda, Munehiro, Shimizu, Takahiro, Uchino, Kiichiro

“…Laser Thomson scattering was applied to an atmospheric-pressure plasma produced in a helium (He) gas flow for measuring the spatial profiles of electron…”
Get full text

Propagation of a Dielectric Barrier Discharge in a Multichannel Mixing Chip Microreactor by Stauss, Sven, Ishii, Chikako, Kuribara, Koichi, Urabe, Keiichiro, Terashima, Kazuo

“…An atmospheric-pressure dielectric barrier discharge was generated inside a T-type mixing multichannel chip microreactor in argon, at peak-to-peak voltages of…”
Get full text

Discharge-Mode Transition in Jet-Type Dielectric Barrier Discharge Using Argon/Acetone Gas Flow Ignited by Small Helium Plasma Jet by Urabe, Keiichiro, Yamada, Keitaro, Sakai, Osamu

“…A discharge-mode transition in a jet-type dielectric barrier discharge (DBD) was triggered by a small fraction of acetone vapor added to an argon (Ar) gas flow…”
Get full text

Microdischarge-Induced Decomposition of Ammonia and Reduction of Silver Ions for Formation of Two-Dimensional Network Structure by Sakai, Osamu, Hiraoka, Yu, Kihara, Naoya, Blanquet, Ella, Urabe, Keiichiro, Tanaka, Masanobu

“…Microdischarge-induced reaction processes working at atmospheric pressure create fractal-like network structure of metal nano-particles which shows variable…”
Get full text

Anomalous Behavior of Cavitation Bubbles Observed in Pulsed Laser Ablation of Ni in Liquid CO2 near the Critical Point by Himeno, Shohei, Kato, Toru, Urabe, Keiichiro, Stauss, Sven, Kato, Satoshi, Muneoka, Hitoshi, Baba, Motoyoshi, Suemoto, Tohru, Terashima, Kazuo

“…Pulsed laser ablation of Ni targets in liquid CO 2 near the critical point (C.P.) (P crit = 7.38 MPa, T crit = 304.1 K) was performed and the time evolution of…”
Get full text

Effect of Series Capacitance and Accumulated Charge on a Substrate in a Deposition Process with an Atmospheric-Pressure Plasma Jet by Ito, Yosuke, Fukui, Yutaka, Urabe, Keiichiro, Sakai, Osamu, Tachibana, Kunihide

“…In order to investigate the effect of accumulated charge on a substrate surface in the deposition of a SiO 2 film with an atmospheric-pressure plasma jet, we…”
Get full text

Discharge-Mode Transition in Jet-Type Dielectric Barrier Discharge Using Argon/Acetone Gas Flow Ignited by Small Helium Plasma Jet by Urabe, Keiichiro, Yamada, Keitaro, Sakai, Osamu

Get full text

Temporally Resolved Imaging of Jet-Type Dielectric Barrier Discharge Using He and Ar/Acetone Crossed Gas Flows by Urabe, K., Sands, B. L., Sakai, O., Ganguly, B. N.

“…We report on temporally resolved images in a jet-type dielectric barrier discharge with two crossed gas flows obtained by a spectrally filtered intensified…”
Get full text

Multiheterodyne interference spectroscopy using a probing optical frequency comb and a reference single-frequency laser by Urabe, Keiichiro, Sakai, Osamu

Get full text

Optical and electrical evaluation methods of plasma-induced damage in InP substrates by Goya, Takahiro, Urabe, Keiichiro, Eriguchi, Koji

“…Indium phosphide (InP) has been focused on as one of emerging materials that can be implemented in advanced semiconductor devices. We proposed optical and…”
Get full text