Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition

Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition

The influence of Ar + SiH4 + O2 plasma formulation on the phase composition and optical properties of amorphous SiOx films with silicon nanoclusters obtained using PECVD with DC discharge modulation was studied. Using a unique technique of ultrasoft X-ray emission spectroscopy, it was found that at...

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Bibliographic Details
Published in:Symmetry (Basel) Vol. 15; no. 9; p. 1800
Main Authors: Terekhov, Vladimir A., Terukov, Evgeniy I., Undalov, Yurii K., Barkov, Konstantin A., Kurilo, Nikolay A., Ivkov, Sergey A., Nesterov, Dmitry N., Seredin, Pavel V., Goloshchapov, Dmitry L., Minakov, Dmitriy A., Popova, Elena V., Lukin, Anatoly N., Trapeznikova, Irina N.
Format: Journal Article
Language:English
Published: Basel MDPI AG 01-09-2023
Subjects:
Amorphous silicon
Annealing
Atmospheric models
Chemical vapor deposition
DC discharge modulation
Emission analysis
Lasers
Mixtures
Molecular beam epitaxy
Nanoclusters
Nanocomposites
Nanocrystals
Optical properties
Oxidation
Oxygen content
Oxygen plasma
Phase composition
Photoluminescence
Plasma
Plasma enhanced chemical vapor deposition
Radiation
Silicon
Silicon dioxide
Silicon films
silicon nanoclusters
Silicon oxides
SiOx
Spectrum analysis
Symmetry
Valence
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Summary:The influence of Ar + SiH4 + O2 plasma formulation on the phase composition and optical properties of amorphous SiOx films with silicon nanoclusters obtained using PECVD with DC discharge modulation was studied. Using a unique technique of ultrasoft X-ray emission spectroscopy, it was found that at a 0.15 mol.% plasma oxygen content, amorphous silicon a-Si films are formed. At a high oxygen content (≥21.5 mol.%), nanocomposite films based on SiOx silicon suboxide containing silicon nanoclusters ncl-Si are formed. It was found that the suboxide matrix consists of a mixture of SiO1.3 and SiO2 phases, and the average oxidation state x in the SiOx suboxide matrix is ~1.5. An increase in the concentration of O2 in the reactor atmosphere from 21.5 to 23 mol.% leads to a decrease in ncl-Si content from 40 to 15% and an increase in the average oxidation state x of SiOx from 1.5 to 1.9. In this case, the suboxide matrix consists of two phases of silicon dioxide SiO2 and non-stoichiometric silicon oxide SiO1.7. Thus, according to the experimental data obtained using USXES, the phase composition of these films in pure form differs in their representation in both random coupling and random mixture models. A decrease in the ncl-Si content of SiOx films is accompanied by a decrease in their sizes from ~3 to ~2 nm and a shift in the photoluminescence band from 1.9 eV to 2.3 eV, respectively.
ISSN:2073-8994
2073-8994
DOI:10.3390/sym15091800