Microbattery technology overview and associated multilayer encapsulation process

Lithium microbatteries with different positive electrode materials (V 2O 5, LiCoO 2, TiOS) in association with a solid electrolyte (LiPONB) and a lithium negative electrode are very promising energy storage systems that can fit all the applications requirements. One of the challenges of the technolo...

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Bibliographic Details
Published in:	Applied surface science Vol. 256; no. 3; pp. S54 - S57
Main Authors:	Salot, R., Martin, S., Oukassi, S., Bedjaoui, M., Ubrig, J.
Format:	Journal Article Conference Proceeding
Language:	English
Published:	Amsterdam Elsevier B.V 15-11-2009 Elsevier
Subjects:	Applied sciences Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science; rheology Electronics Encapsulation Exact sciences and technology Lithography, masks and pattern transfer Materials science MEMS Methods of deposition of films and coatings; film growth and epitaxy Microbattery Microelectronic fabrication (materials and surfaces technology) PECVD Photolithography Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Encapsulation Microbattery MEMS PECVD Photolithography Water Oxygen Solid electrolyte Silicon nitride Permeation Multiple layer Lithium Amorphous state Inorganic compound Film growth Silicon oxides Battery
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Summary:	Lithium microbatteries with different positive electrode materials (V 2O 5, LiCoO 2, TiOS) in association with a solid electrolyte (LiPONB) and a lithium negative electrode are very promising energy storage systems that can fit all the applications requirements. One of the challenges of the technology is related to the fact that lithium microbatteries are easily degraded in atmosphere. Indeed, these devices require encapsulation with a barrier material, which exhibits extremely low permeation rates for water vapour and oxygen. To obtain such a high barrier, we chose to direct our studies on layers deposited by plasma-enhanced chemical vapour deposition (PECVD), and more particularly on amorphous materials like silicon oxide (SiOx) and silicon nitride (SiNx). Both the active layers of the microbattery architecture and the multilayer encapsulation stack will be discussed.
ISSN:	0169-4332 1873-5584
DOI:	10.1016/j.apsusc.2009.09.086