Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a Tc onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and...

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Bibliographic Details
Published in:	Applied physics letters Vol. 51; no. 25; pp. 2164 - 2166
Main Authors:	MAKOUS, J. L, MARITATO, L, FALCO, C. M, CRONIN, J. P, RAJENDRAN, G. P, UHLMANN, E. V, UHLMANN, D. R
Format:	Journal Article
Language:	English
Published:	Melville, NY American Institute of Physics 21-12-1987
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Crystal growth Stoichiometry Electrical conductivity Support Transition metal Compounds Experimental study X ray diffraction Inorganic compound Thin film Characterization Superconducting materials Rutherford backscattering Cathodic sputtering Thermal annealing Barium Copper Yttrium Oxides Mixed High temperature superconductor
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Summary:	We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a Tc onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.98929