SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors

Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration...

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Bibliographic Details
Published in:	2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME) pp. 33 - 37
Main Authors:	Stavrov, V., Stavreva, G., Tomerov, E., Shulev, A., Chakarov, D., Tsenkov, Y.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-10-2017
Subjects:	contact position sensors flexure transducer full bridge configuration Layout Micromechanical devices Monitoring Piezoresistive devices Position measurement Sensitivity Sensors sidewall piezoresistors
Online Access:	Get full text
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Summary:	Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6.
DOI:	10.1109/SIITME.2017.8259852