Search Results - "Torii, Hironori"
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Low propagation loss in a one-port SAW resonator fabricated on single-crystal diamond for super-high-frequency applications
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-05-2013)“…Diamond has the highest known SAW phase velocity, sufficient for applications in the gigahertz range. However, although numerous studies have demonstrated SAW…”
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Journal Article -
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Characterization and ohmic contact properties of indium tin-oxide films prepared on p-type GaN using electron-cyclotron-resonance plasma-sputter deposition
Published in Thin solid films (30-08-2024)“…•ITO films grown using electron-cyclotron-resonance (ECR) plasma sputtering.•ECR plasma deposition does not damage the semiconductor nor the substrate…”
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High-quality GaN thin film deposition at low temperature by ECR plasma-assisted sputter deposition method and its dependence of sapphire substrate misorientation angle
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-12-2024)“…Gallium nitride (GaN) thin films were deposited by electron cyclotron resonance (ECR) plasma-assisted sputtering, which combines GaN-magnetron sputtering with…”
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Journal Article -
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Epitaxial Indium Tin Oxide Film Deposited on Sapphire Substrate by Solid-Source Electron Cyclotron Resonance Plasma
Published in Japanese Journal of Applied Physics (01-01-2012)“…Indium tin oxide (ITO) thin films were epitaxially grown on sapphire substrates by solid-source electron cyclotron resonance (ECR) plasma deposition. Compared…”
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5
Expansion of lattice constants of aluminum nitride thin film prepared on sapphire substrate by ECR plasma sputtering method
Published in Japanese Journal of Applied Physics (01-11-2014)“…Wurzite aluminum nitride is prepared on a c-plane sapphire substrate by electron cyclotron resonance plasma-enhanced sputtering deposition (ECR sputtering)…”
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Journal Article -
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Epitaxial Indium Tin Oxide Film Deposited on Sapphire Substrate by Solid-Source Electron Cyclotron Resonance Plasma
Published in Japanese Journal of Applied Physics (01-01-2012)Get full text
Journal Article -
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Development of High‐Reflectivity and Antireflection Dielectric Multilayer Mirrors for AlGaN‐Based Ultraviolet‐B Laser Diodes and their Device Applications
Published in Physica status solidi. A, Applications and materials science (01-08-2023)“…Fabrication techniques for high‐reflectivity (HR) and antireflection (AR) dielectric multilayer mirrors for AlGaN‐based ultraviolet‐B (UV‐B) laser diodes are…”
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Low propagation loss in a one-port resonator fabricated on single-crystal diamond
Published in 2011 IEEE International Ultrasonics Symposium (01-10-2011)“…Diamond has the highest known surface acoustic wave (SAW) phase velocity, sufficient for applications in the gigahertz range. However, although numerous…”
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Conference Proceeding -
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One-port SAW resonators fabricated on single-crystal diamond
Published in 2013 IEEE MTT-S International Microwave Symposium Digest (MTT) (01-06-2013)“…Diamond has the highest known surface acoustic wave (SAW) phase velocity, sufficient for applications in the gigahertz range. In addition, diamond can be…”
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Conference Proceeding -
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Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma
Published in 2013 6th IEEE/International Conference on Advanced Infocomm Technology (ICAIT) (01-07-2013)“…We prepared AlN film on c-plane sapphire substrate by electron cyclotron resonance plasma-enhanced sputtering deposition (ECR-sputtering). X-ray diffraction…”
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Conference Proceeding