Search Results - "Tomzig, E"
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Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields
Published in Journal of crystal growth (01-08-2001)“…Turbulent silicon melt flows are studied in large diameter Czochralski crucibles under the influence of alternating, steady and combined magnetic fields. The…”
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2
Crystal growth melt flow control by means of magnetic fields
Published in Energy conversion and management (01-02-2002)“…Contactless melt flow control is important in many crystal growth technologies. Typically, steady magnetic fields are used to damp convective flow. On the…”
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3
Modeling analysis of unsteady three-dimensional turbulent melt flow during Czochralski growth of Si crystals
Published in Journal of crystal growth (01-08-2001)“…We describe a computational model based on Large Eddy Simulation to calculate 3D unsteady turbulent melt convection in Czochralski systems for Si-crystal…”
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4
Physical modelling of the melt flow during large-diameter silicon single crystal growth
Published in Journal of crystal growth (01-09-2003)“…The reported investigations concern physical modelling of Czochralski growth of silicon large-diameter single crystals. InGaSn eutectic was used as a modelling…”
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5
Prediction of the growth interface shape in industrial 300 mm CZ Si crystal growth
Published in Journal of crystal growth (15-05-2004)“…A model approach for a modification of the effective heat conductivity in the turbulent melt flow simulation for 28″ Si CZ crucibles is presented, which helped…”
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6
Numerical 3D modelling of turbulent melt flow in a large CZ system with horizontal DC magnetic field. II. Comparison with measurements
Published in Journal of crystal growth (15-04-2004)“…This paper presents a comparison between numerically calculated and measured temperature distributions in turbulent flow in a laboratory model for a CZ large…”
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7
Thermal simulation of the Czochralski silicon growth process by three different models and comparison with experimental results
Published in Journal of crystal growth (01-10-1997)“…Temperatures were measured within an industrial Czochralski silicon puller and compared with simulation results. The temperatures were measured by…”
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8
Numerical model of turbulent CZ melt flow in the presence of AC and CUSP magnetic fields and its verification in a laboratory facility
Published in Journal of crystal growth (01-08-2001)“…The paper describes a numerical simulation tool for heat and mass transfer processes in large diameter CZ crucibles under the influence of several non-rotating…”
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9
Effects of various magnetic field configurations on temperature distributions in Czochralski silicon melts
Published in Microelectronic engineering (01-05-2001)“…Magnetic fields are of growing interest for improvement of the silicon Czochralski crystal growth process. The use of steady magnetic fields provides…”
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10
Analysis of turbulent flow in silicon melts by optical temperature measurement
Published in Materials science & engineering. B, Solid-state materials for advanced technology (03-04-2000)“…Turbulent convection in silicon melts plays a decisive role for the transport of heat and oxygen during the silicon Czochralski crystal growth. Information on…”
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11
Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth
Published in Journal of crystal growth (01-04-2002)“…We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged…”
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12
Silicon melt convection in large size Czochralski crucibles
Published in Materials science in semiconductor processing (01-08-2002)“…The melt flow in large diameter crucibles during the growth of silicon (Si) single crystals of 300 mm diameter is characterized by turbulent large-scale…”
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13
Oxygen distribution in silicon melt during a standard Czochralski process studied by sensor measurements and comparison to numerical simulation
Published in Journal of crystal growth (01-03-1999)“…The distribution of oxygen in silicon melts kept in a 14″ diameter silica crucible of a standard Czochralski puller was measured using an electrochemical…”
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14
Global model of Czochralski silicon growth to predict oxygen content and thermal fluctuations at the melt–crystal interface
Published in Microelectronic engineering (01-05-2001)“…A computational model combining calculations of global heat and mass transfer in the entire CZ system with Large Eddy Simulation (LES) of turbulent melt…”
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15
Study of oxygen transport in Czochralski growth of silicon
Published in Microelectronic engineering (01-07-1999)“…The present status and special features of experimental analysis and numerical modelling of oxygen transport in the Czochralski growth of silicon is treated…”
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16
Influence of pyrolytic boron nitride crucibles on GaAs crystal growth process and crystal properties
Published in Journal of crystal growth (01-08-1995)“…The influence of pyrolytic boron nitride (pBN) crucibles on the GaAs liquid encapsulated Crochralski (LEC) growth process and on the crystal properties was…”
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17
Redistribution of Cr in GaAs: Cr and of V in GaAs: V after implantation of Si, Be, or B and annealing in a controlled atmosphere
Published in Applied physics letters (01-01-1985)“…The redistribution of V in V-doped and Cr in Cr-doped semi-insulating GaAs substrates after implantation with Si, Be, B and subsequent controlled atmosphere…”
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18
Prediction of the growth interface shape in industrial 300mm CZ Si crystal growth
Published in Journal of crystal growth (01-05-2004)Get full text
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19
Application of dynamic and combined magnetic fields in the 300mm silicon single-crystal growth
Published in Materials science in semiconductor processing (01-08-2002)Get full text
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20
Challenges for economical growth of high quality 300 mm CZ Si crystals
Published in Microelectronic engineering (01-07-1999)“…The changeover from 200 mm to 300 mm is required by the semiconductor industry due to the necessity for larger chip sizes and demand for decreasing cost…”
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