Search Results - "Tomerov, E."

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes by Pedrak, R., Ivanov, Tzv, Ivanova, K., Gotszalk, T., Abedinov, N., Rangelow, I. W., Edinger, K., Tomerov, E., Schenkel, T., Hudek, P.

“…This article describes microprobes for noncontact scanning force microscopy that make use of a direct-oscillating thermally driven bimorph actuator with…”
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Thermally driven micromechanical beam with piezoresistive deflection readout by Ivanov, Tzv, Gotszalk, T., Grabiec, P., Tomerov, E., Rangelow, I.W.

“…This article reports on the fabrication and characterization of micromachined thermally driven micromechanical beam with piezoresistive readout for micro- and…”
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Project MECA: Training course in microsystems with piezoresistive feedback by Stavrov, V., Stavreva, G., Tomerov, E., Gieva, D., Radonov, R.

“…This paper presents a training course on practical aspects in design, technology and prototype fabrication of microsystems with piezoresistive feedback,…”
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SelectiveSensitivity of contact MEMS position sensors with sidewall piezoresistors by Stavrov, V., Stavreva, G., Tomerov, E., Shulev, A., Chakarov, D., Tsenkov, Y.

“…Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about…”
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Novel MEMS Piezoresistive Sensor Array Cell by Stavrov, V., Tomerov, E., Stavreva, G., Tsenev, V., Philippov, P.

“…The future of analytical methods based on micro-fabricated cantilever sensors is critically sensitive to parallel processing: some because of the increased…”
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