Search Results - "Tobback, Bert"
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Demonstrating Electrical Connection on Reconstituted ASIC Chips on 8-Inch Silicon Wafer
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21-01-2024)“…Wafer reconstitution entails the assembly of dies from multiple sources onto a wafer by die to wafer attach [1]-[4]. This reconstituted wafer can then be used…”
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Conference Proceeding -
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Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies
Published in Proceedings of the IEEE International Interconnect Technology Conference (03-06-2024)“…Superconducting Nb airbridges were fabricated in imec's 300 mm pilot line utilizing an advanced production toolset. An optimized process flow, which does not…”
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Conference Proceeding -
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Low temperature backside damascene processing on temporary carrier wafer targeting 7μm and 5μm pitch microbumps for N equal and greater than 2 die to wafer TCB stacking
Published in 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) (01-05-2022)“…In this paper, for first time, damascene process on thinned and bonded device wafer to a carrier using TBM layer is introduced. All the BS process steps…”
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Conference Proceeding -
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Overlay performance of through Si via last lithography for 3D packaging
Published in 2016 IEEE 18th Electronics Packaging Technology Conference (EPTC) (01-11-2016)“…Foundry customers and makers of leading-edge devices are evaluating through-silicon via (TSV) for next-generation three-dimensional (3D) packaging. Scaling the…”
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Conference Proceeding